Tomographic Imaging Microscopy Sample Repositioning

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Solution Overview

Problem

Tomographic imaging microscopy faces challenges in using higher energy charged particle beams due to sample degradation, which limits image quality and requires frequent repositioning to minimize damage, hindering the acquisition of high-quality images across multiple angles.

Innovation Solution

The method involves repositioning the sample between angular positions to irradiate different regions with a high-energy charged particle beam, allowing for continuous rotation and translation to maintain new areas of the sample for each imaging iteration, thereby reducing degradation and enabling higher beam doses.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a higher energy charged particle beam is used to improve image quality, then emissions/scattering increases and image quality improves, but sample degradation rate increases

Engineering Contradiction:

Improveimage qualityVSAvoidsample degradation

Core Design Contradiction:

Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The sample is divided into multiple regions that are irradiated sequentially at different angular positions. By segmenting the sample into different irradiation zones and rotating the sample holder, the patent enables higher energy beam irradiation of fresh sample regions while minimizing cumulative damage to any single region, thus resolving the contradiction between using high energy for better images and avoiding sample degradation

Inventive Principle:

Principle #1Segmentation

2Reliability

If the sample is repositioned frequently to reduce degradation, then sample integrity is maintained, but acquisition time increases

Engineering Contradiction:

Improvesample integrityVSAvoidacquisition time

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The patent implements continuous rotation of the sample holder during irradiation, allowing the beam to continuously scan across different sample regions without stopping for discrete repositioning operations. This continuous motion maintains sample integrity by constantly presenting fresh regions to the beam while minimizing acquisition time through uninterrupted data collection

Inventive Principle:

Principle #20Continuity of useful action

Solution Approach 2:

The system transitions from static, discrete repositioning steps to dynamic continuous rotation during irradiation. The sample holder rotates continuously, enabling the beam to dynamically scan across the sample surface, which maintains sample integrity through constant motion while eliminating time losses associated with stopping and repositioning

Inventive Principle:

Principle #15Dynamics

3Measurement precision

If higher beam doses are used to improve resolution, then image resolution improves, but sample damage increases

Engineering Contradiction:

Improveimage resolutionVSAvoidsample damage

Core Design Contradiction:

Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The total beam dose is segmented across multiple sample regions rather than concentrating it on one area. By dividing the sample into different irradiation zones and rotating through them, the patent allows each region to receive a manageable dose while the overall acquisition achieves high resolution through aggregation of data from multiple regions

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent introduces the temporal dimension of continuous rotation during irradiation, transforming the dosing strategy from static high-dose exposure to dynamic distributed dosing. This allows higher total beam doses to be delivered by spreading them across space and time, achieving high resolution while preventing localized sample damage

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the resolution and speed of tomographic image acquisition by allowing up to 10 times greater beam doses, reducing sample damage, and improving image quality without compromising the sample integrity.

Implementation Method 1

irradiating, with a charged particle beam, a first region of the sample in a first angular position; detecting first emissions resultant from the charged particle beam irradiating the first region

Methodology Applied

Scientific EffectCharged particle beam irradiation: Electron Beam

Implementation Method 2

a rotatable sample holder operable to rotate the sample about an axis perpendicular to the charged particle beam between a first angular position and a second angular position

Methodology Applied

Scientific EffectRotational movement:

Data Source

PatentUS11499926B2Method for diffraction pattern acquisition

Publication Date: 2022.11.15 FEI CO

AI summary

Methods and systems for conducting tomographic imaging microscopy of a sample with a high energy charged particle beam include irradiating a first region of the sample in a first angular position with a high energy charged particle beam and detecting emissions resultant from the charged particle beam irradiating the first region. The sample is repositioned into a second angular position such that the second region to be different than the first region, and a second region of the sample is irradiated. Example repositioning may include one or more of a translation of the sample, a helical rotation of the sample, the sample being positioned in a non-eucentric position, or a combination thereof. Emissions resultant from irradiation of the second region are then detected, and a 3D model of a portion of the sample is generated based at least in part on the detected first emissions and detected second emissions.