Tomographic Microscopy Imaging 3D Region Localization
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Solution Overview
Problem
Charged particle beam microscopes face inefficiencies in tomographic imaging due to sample misalignment and imperfections, leading to image precession and reduced throughput, especially for dose-sensitive samples.
Innovation Solution
A method and system that determine the three-dimensional location of a defined region within a sample prior to imaging, using image analysis and projection techniques to accurately position and focus the imaging system, thereby correcting for misalignment and imperfections.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If traditional tomographic imaging is performed by tilting the sample holder, then three-dimensional imaging capability is achieved, but image precession occurs due to misalignment and imperfections, reducing imaging efficiency
Solution Approach 1:
The system determines the three-dimensional location of the defined region before performing tomographic imaging. This preliminary localization step allows the imaging system to pre-position itself, preventing the need for continuous tracking and repositioning during the imaging process, thereby eliminating image precession and improving imaging efficiency
Solution Approach 2:
The invention replaces the mechanical tracking and repositioning approach with a computational approach. By using image analysis and projection techniques to determine the three-dimensional location, the system substitutes mechanical adjustments with calculated positioning, reducing mechanical errors and improving precision
2Measurement precision
If the tracked feature moves out of the field of view due to precession, then the imaging system must reposition and recapture the feature, but this leads to decreased imaging efficiency and increased time consumption
Solution Approach 1:
The three-dimensional location of the defined region is determined in advance, allowing the imaging system to pre-position itself accurately. This preliminary positioning ensures the feature remains within the field of view throughout the tilting process, eliminating the need for time-consuming repositioning and recapture operations
Solution Approach 2:
The system uses image analysis to detect the position of the defined region and provides feedback to adjust the imaging system's position. This feedback mechanism ensures continuous accurate positioning of the feature within the field of view, preventing loss of tracking and reducing time loss
3Productivity
If dose-sensitive samples are illuminated before feature tracking to detect when the feature leaves the field of view, then the feature can be tracked, but the sample degradation increases rendering the sample unfit for further imaging
Solution Approach 1:
The three-dimensional location is determined before tomographic imaging begins. This preliminary knowledge allows the imaging system to maintain optimal positioning throughout the process, enabling continuous tracking without additional illumination, thereby protecting dose-sensitive samples from excessive radiation exposure
Solution Approach 2:
The system uses the previously determined three-dimensional location information to self-correct positioning during imaging. This self-service capability eliminates the need for continuous monitoring and repositioning that would require additional illumination, allowing the imaging process to proceed without further degrading the sample
Data Source
AI summary
The present invention relates to a method for acquiring tomographic images of a sample in a microscopy system, wherein the sample comprises a defined region, and wherein the method comprises determining a location in three-dimensional space of the defined region, wherein the method further comprises capturing an image of at least a part of the sample, and wherein the determination of the location in three-dimensional space of the defined region is based, at least in part, on the image of the part of the sample. The present invention also relates to a corresponding microscopy system and a computer program product to perform the method according to the present invention.