Tool Assignment Preference Determination in Semiconductor Manufacturing

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Solution Overview

Problem

In semiconductor manufacturing, the relationship between manufacturing cycle time and tool utilization represents a trade-off, and improper assignment of tool preferences can lead to manufacturing damage, efficiency decreases, and delivery delays due to tool variations and production limitations.

Innovation Solution

A two-step data feedback method is used to determine tool assignment preferences by calculating demand moves and assigning preferences based on statistical methods, such as the tool loading, move linear programming, and two-step data feedback methods, ensuring optimal tool utilization and on-time delivery.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If tools are assigned without considering assignment preferences, then tool utilization rate increases, but manufacturing cycle time increases and delivery delays occur

Engineering Contradiction:

Improvetool utilization rateVSAvoidmanufacturing cycle time

Core Design Contradiction:

ProductivityVSLoss of time

Solution Approach 1:

The patent changes the parameter of tool assignment from random or simple round-robin to preference-based assignment. Each tool is assigned a preference value (1st preference, 2nd preference, etc.) based on its capabilities and product requirements. This parameter change enables the system to select tools that best match product specifications, reducing unnecessary moves and cycle time while maintaining high utilization rates.

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The patent replaces manual or simple automated tool assignment mechanisms with an intelligent preference-based assignment system. The system automatically calculates assignment preferences based on tool capabilities, product requirements, and current manufacturing status, then assigns tools optimally without human intervention. This substitution enables dynamic optimization of both utilization rate and cycle time.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Manufacturing precision

If tools are assigned to bottleneck tools causing manufacturing limitations, then manufacturing precision is maintained, but productivity decreases

Engineering Contradiction:

Improveproduct qualityVSAvoidmanufacturing efficiency

Core Design Contradiction:

Manufacturing precisionVSProductivity

Solution Approach 1:

The patent introduces dynamic tool assignment preferences that can change based on manufacturing conditions. Instead of static bottleneck assignments, the system dynamically adjusts preferences based on current product requirements, tool availability, and manufacturing status. This enables the system to adaptively balance quality requirements with productivity needs, selecting the most appropriate tools for each specific situation.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The patent segments tools into different preference categories (1st preference, 2nd preference, etc.) based on their capabilities and suitability for specific products. This segmentation allows the system to precisely match tools to products, ensuring quality requirements are met while avoiding unnecessary assignments to bottleneck tools, thereby maintaining high productivity.

Inventive Principle:

Principle #1Segmentation

3Device complexity

If tool assignment preferences are not determined, then device complexity is reduced, but loss of time increases due to improper assignment

Engineering Contradiction:

Improveassignment system complexityVSAvoiddelivery time

Core Design Contradiction:

Device complexityVSLoss of time

Solution Approach 1:

The patent implements a feedback mechanism where the system continuously monitors tool performance, product requirements, and manufacturing status, then uses this information to determine and update assignment preferences. The feedback loop enables the system to learn from past assignments and improve future assignments, reducing delivery time while maintaining manageable system complexity through automated decision-making.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The patent enables the assignment system to determine preferences automatically based on predefined criteria and current manufacturing conditions. The system serves itself by autonomously calculating preferences, selecting appropriate tools, and making assignments without external intervention. This self-service capability reduces delivery time while keeping the system relatively simple through rule-based automated decision-making.

Inventive Principle:

Principle #25Self-service

Data Source

PatentUS7292903B2Methods for determining tool assignment preference and manufacturing systems using the same

Publication Date: 2007.11.06 POWERCHIP SEMICON MFG CORP

AI summary

A method for determining tool assignment preference applied to a semiconductor manufacturing system. At least one first tool and second tool and at least one first semiconductor process and second semiconductor process applied to the tools are provided. Demand moves provided by the first and second semiconductor processes are calculated. Assignment preferences of the first and second tools are determined using a statistical method. The statistical method is a two-step data feedback method, comprising the steps of, in the first step, calculating assignment preferences of tools without setting assignment preferences, and, in the second step, assigning assignment preferences to the first and second tools according to the calculation result in the first step, wherein the first tool is assigned to a first assignment preference with a lowest average utility rate, and the second tool is assigned to a second assignment preference.