Tool Center Point Position Transformation for Processing Control

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Solution Overview

Problem

Existing measurement systems struggle to accurately transform the position of a measurement member attached to a movable part of a processing apparatus to the tool center point, leading to inaccuracies in processing control.

Innovation Solution

A measurement system that includes a first measurement apparatus to measure the position of a measurement member on a movable part, a measurement control apparatus to calculate and transmit position transformation information, and a processing control apparatus to control the movement of the movable part based on this information, enabling precise alignment of the tool center point.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a measurement member is attached to a movable part at a position different from the tool center point, then the measurement system can measure the position of the measurement member, but the position transformation to the tool center point becomes inaccurate

Engineering Contradiction:
Improveposition measurement accuracyVSAvoidposition transformation accuracy
Core Design Contradiction:
Measurement precisionVSManufacturing precision

Solution Approach 1:

The patent introduces a third measurement apparatus as an intermediary to directly measure the tool center point position. This mediator apparatus bridges the gap between the measurement member position and the tool center point, enabling accurate position transformation without requiring the measurement member to be attached at the tool center point itself

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces direct mechanical attachment of the measurement member at the tool center point with an optical measurement system. The third measurement apparatus uses non-contact optical methods to measure the tool center point position, substituting mechanical constraints with optical field-based measurement

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Manufacturing precision

If the tool center point position is directly measured, then position transformation accuracy improves, but the device complexity increases

Engineering Contradiction:
Improveposition transformation accuracyVSAvoidmeasurement system complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The third measurement apparatus is designed to perform multiple functions: it measures both the tool center point position and the measurement member position. This multi-functional apparatus reduces overall system complexity compared to using separate dedicated measurement devices for each function

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The third measurement apparatus measures the tool center point position autonomously without requiring additional external measurement devices or complex calibration procedures. The system self-services by directly acquiring the necessary position data through its own measurement capabilities

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This system ensures accurate transformation of the measurement member's position to the tool center point, enhancing the precision and accuracy of processing operations.

Implementation Method 1

a first measurement apparatus that is configured to apply measurement light to a measurement member attached to a movable part

Methodology Applied
Scientific EffectLight reflection: Reflection

Data Source

PatentUS20250339972A1Measurement system, processing system, measurement method, and processing method
Publication Date: 2025.11.06 NIKON CORP
  • US20250339972A1 patent drawing
  • US20250339972A1 patent drawing
  • US20250339972A1 patent drawing

AI summary

A measurement system includes: a first measurement apparatus that is configured to measure a position of a measurement member attached to a movable part of a processing apparatus; and a measurement control apparatus that is configured to control the first measurement apparatus. The measurement control apparatus includes: an arithmetic unit that calculates position transformation information, based on first position information indicating the position of the measurement member measured by the first measurement apparatus in a first state, and based on second position information indicating the predetermined position; and a transmission unit that transmits the calculated position transformation information to a processing control apparatus configured to control a movement of the movable part of the processing apparatus. The transmission unit transmits, to the processing control apparatus, third position information indicating the position of the measurement member measured by the first measurement apparatus in a second state.