Tool Set for Liquid Environment Pin Position Verification
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Solution Overview
Problem
Existing methods for checking the positioning of pins around a holding stage, especially in environments with liquids, are costly and prone to inaccuracies due to light refraction, making them unsuitable for processing apparatuses using liquids.
Innovation Solution
A tool set comprising a reference tool, a dummy workpiece, and a check pin is used to verify the correct positioning of pins by inserting the check pin into an annular groove formed between the dummy workpiece and the reference tool, ensuring the pins are correctly aligned.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a camera and image analyzing device are used to detect positional deviation, then measurement precision is improved, but device complexity and cost increase
Solution Approach 1:
The patent creates a reference image of the annular groove pattern that serves as a template for comparison. Instead of using complex real-time imaging systems, a simple reference image is captured once and reused for multiple positioning checks, replacing the need for continuous complex image analysis hardware
Solution Approach 2:
The patent extracts only the essential feature needed for positioning verification - the annular groove pattern formed by the positioning pins - and uses this simplified pattern for comparison. This extraction eliminates the need for complex camera systems by focusing only on the critical geometric relationship between the workpiece outer edge and the positioning pin array
2Measurement precision
If a camera-based system is used for position detection, then measurement precision is improved, but reliability deteriorates due to light refraction from liquids
Solution Approach 1:
The patent introduces an intermediary reference image that mediates between the physical positioning structure and the verification process. The reference image serves as a stable intermediate representation that can be compared against actual positioning results without requiring direct optical measurement through liquid, thereby eliminating refraction-related reliability issues
Solution Approach 2:
The patent replaces the optical measurement system (camera-based) with a mechanical comparison method. By using a reference image captured under known conditions and comparing subsequent positioning results against this reference, the system substitutes complex optical measurement with a simpler image comparison approach that is not affected by liquid refraction
3Measurement precision
If expensive camera and image analyzing devices are used, then measurement precision is improved, but ease of manufacture deteriorates
Solution Approach 1:
The patent uses a simple reference image that can be easily captured and stored, replacing expensive, complex image analysis systems. This reference image acts as a disposable or reusable template that requires minimal manufacturing complexity while providing sufficient measurement precision for positioning verification
Solution Approach 2:
The patent creates a simple copy (reference image) of the annular groove pattern that can be easily stored and reused. This copying approach eliminates the need for expensive real-time imaging hardware, as the reference image can be captured once using simple means and then used repeatedly for positioning verification without additional complex manufacturing
Data Source
AI summary
A tool set that can easily check positions of positioning pins for a workpiece even in an environment using a liquid is disclosed. The tool set includes: a reference tool to be placed on the holding stage; a dummy workpiece to be placed on the reference tool; and a check pin having a cylindrical circumferential surface. The reference tool has a central protrusion having a cylindrical circumferential surface. The dummy workpiece has a circular through-hole having a diameter larger than a diameter of the circumferential surface of the central protrusion. A diameter of the check pin is smaller than a value determined by dividing a difference between the diameter of the circular through-hole and the diameter of the circumferential surface of the central protrusion by 2.