Top Gate Polysilicon TFT Photosensitive Element

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Solution Overview

Problem

Existing photosensitive elements, particularly those made of amorphous silicon thin film transistors, have suboptimal sensitivity and performance, necessitating the development of a more effective light-intensity measurement solution using low-temperature polysilicon thin film transistors.

Innovation Solution

A photosensitive element comprising a first thin film transistor as a control switch and a second thin film transistor as a photosensitive unit, both of which are top gate type and made of low-temperature polysilicon, with a transparent gate region to expose the active layer for light intensity measurement, enhancing sensitivity and measurement efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If amorphous silicon thin film transistors are used for photosensitive elements, then manufacturing is easier, but sensitivity and performance deteriorate

Engineering Contradiction:
Improveease of manufactureVSAvoidsensitivity
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

The patent changes the material parameter from amorphous silicon to low-temperature polysilicon, which improves carrier mobility and photosensitive performance while maintaining low-temperature processing advantages. This parameter change resolves the contradiction by achieving both ease of manufacture and high sensitivity through material optimization.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If a traditional opaque gate structure is used, then transistor control is better, but light intensity measurement capability deteriorates

Engineering Contradiction:
Improvetransistor controlVSAvoidlight intensity measurement
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The patent applies local quality by making the gate structure partially transparent in specific regions while maintaining opaque control in other areas. The gate electrode includes transparent conductive oxide (TCO) portions that allow light transmission for sensing, while other portions provide electrical control, thus resolving the contradiction between control reliability and measurement capability.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The gate structure uses composite materials combining transparent conductive oxide (such as ITO, IZO, or IGZO) with metal layers. This composite structure provides both electrical conductivity for transistor control and optical transparency for light intensity measurement, simultaneously achieving reliable control and measurement precision.

Inventive Principle:
Principle #40Composite materials

3Measurement precision

If high sensitivity photosensitive elements are implemented, then measurement precision improves, but device complexity increases

Engineering Contradiction:
ImprovesensitivityVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent merges the transistor gate structure with the photosensitive sensing structure into a single integrated component. The gate electrode serves dual functions: electrical control of the transistor and optical transmission for light sensing. This merging achieves high sensitivity without increasing device complexity, as the same structural elements perform multiple functions.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The gate structure is designed with multi-functionality, serving both as the electrical control element of the transistor and as the light transmission pathway for photosensitive detection. This universal design eliminates the need for separate control and sensing components, achieving high measurement precision while maintaining simple device architecture.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves high sensitivity and efficient light intensity measurement, extending the application scope of photosensitive elements and improving measurement speed and efficiency, particularly in display panels and X-ray imaging devices.

Implementation Method 1

A gate of the second thin film transistor includes a transparent region corresponding to at least a part of an active layer of the second thin film transistor, thereby achieving a measurement of a light intensity entering the second thin film transistor

Methodology Applied
Scientific EffectPhotosensitive effect: Photoelectric Effect

Data Source

PatentUS10236405B2Photosensitive element, display panel, display device and X-ray imaging device
Publication Date: 2019.03.19 BOE TECHNOLOGY GROUP CO LTD
  • US10236405B2 patent drawing
  • US10236405B2 patent drawing
  • US10236405B2 patent drawing

AI summary

The embodiments of the invention provide a photosensitive element, a display panel, a display device, and an X-ray imaging device. The photosensitive element includes a first top gate type thin film transistor as a control switch and a second top gate type thin film transistor serving as a photosensitive unit. The first top gate type thin film transistor is connected to the second top gate type thin film transistor. A gate of the second thin film transistor includes a transparent region corresponding to at least a part of an active layer of the second thin film transistor, thereby achieving a measurement of a light intensity entering the second thin film transistor when the first thin film transistor and the second thin film transistor are turned on simultaneously.