Integrated Top Lid Support for Stable Plasma Reaction Space
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Solution Overview
Problem
The top lid of substrate processing apparatuses sag due to negative pressure and thermal deformation, leading to non-uniform gas flow and plasma distribution, and increased device complexity.
Innovation Solution
A top lid with an integral support formed from the same material as the lid, featuring a cross-shaped design with symmetric protrusions, which minimizes thermal deformation by maintaining a constant distance between gas supply units and substrate supports.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a support is installed in a vertical direction between the chamber wall and the top lid to prevent sagging, then the top lid deformation is reduced, but the device complexity increases and interference may occur between reactors during substrate transfer
Solution Approach 1:
The support structure is merged with the top lid to form an integral unit. The support protrudes from one surface of the top lid, eliminating the need for separate vertical supports between the chamber wall and top lid. This integration reduces device complexity while maintaining the top lid's stability against sagging during substrate processing
Solution Approach 2:
The support structure is segmented into multiple protrusions extending from different surfaces of the top lid. These segmented supports distribute the mechanical load and provide stability without requiring a single complex vertical support structure, thereby reducing interference between reactors during substrate transfer
2Stability of the object's composition
If the top lid is made thicker to prevent thermal deformation, then the thermal deformation is reduced, but the weight of the top lid increases
Solution Approach 1:
The support structure is merged with the top lid material, forming an integral component. This integration allows the support to contribute to both structural stability and thermal resistance without adding separate heavy components. The protruding supports distribute thermal stress more effectively, reducing the need for excessive thickness
Solution Approach 2:
The top lid and support are formed from the same material with consistent thermal properties. This material uniformity ensures that thermal expansion and deformation are distributed evenly throughout the integrated structure, preventing localized stress concentrations that would require additional thickness for compensation
3Manufacturing precision
If the distance between the gas supply unit and substrate support is maintained constant by tilting the substrate support, then the reaction space distance is maintained, but non-uniform gas flow and plasma distribution occur
Solution Approach 1:
Instead of tilting the substrate support to maintain distance, the invention inverts the approach by making the top lid support structure itself adjustable or compliant. The protruding supports can tilt or deform to compensate for top lid sagging, maintaining the perpendicular alignment of the gas supply unit relative to the substrate support without tilting the substrate support itself
Solution Approach 2:
The support structure is designed with dynamic characteristics that allow it to adapt to thermal and vacuum conditions. The protruding supports can flex or adjust their orientation in response to top lid deformation, automatically maintaining the optimal distance and alignment between the gas supply unit and substrate support without compromising gas flow uniformity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The integrated support maintains a consistent reaction space distance, ensuring uniform gas flow and plasma distribution, reducing process defects and device complexity.
Implementation Method 1
the top lid 3 may sag due to a negative pressure (i.e., vacuum suction power) of the inner space 8 generated by the exhaust unit (not shown) such as a vacuum pump
Implementation Method 2
when a substrate is processed at a high temperature, the top lid 3 may further sag due to thermal deformation
Data Source
AI summary
A top lid capable of minimizing thermal deformation when a substrate processing temperature increases includes a support for supporting the top lid, the support protruding integrally from one surface of the top lid.