Top-Mounted Turbomolecular Pump Layout for Mass Spectrometer Maintenance
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Solution Overview
Problem
Existing mass spectrometers face challenges in securing adequate maintenance workspaces for turbomolecular pumps due to their large weight and the limited space available, especially when multiple units are placed in a narrow area or near walls.
Innovation Solution
The turbomolecular pump is positioned above the vacuum chamber in a vertical direction, and a separation mechanism, such as a lever, screw, or wedge, is used to detach it easily from the vacuum chamber, allowing maintenance to be performed on the upper surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the turbomolecular pump is attached to the sidewall or lower portion of the vacuum chamber, then the vacuum chamber can be maintained in a high vacuum state, but the work space for maintenance and repair is limited
Solution Approach 1:
The turbomolecular pump is repositioned from the traditional sidewall or lower portion attachment to the upper surface of the vacuum chamber, utilizing the vertical dimension. This dimensional change allows maintenance personnel to access the pump from above, significantly improving work space and maintenance accessibility while maintaining the pump's vacuum functionality
2Area of stationary object
If multiple mass spectrometers are disposed in a narrow space or near walls, then space utilization is improved, but the work space for pump maintenance is further limited
Solution Approach 1:
By positioning the turbomolecular pump on the upper surface of the vacuum chamber, the design enables maintenance personnel to access the pump from the vertical direction (from above). This allows maintenance work to be performed even when the mass spectrometer is installed in narrow spaces or near walls, as the pump can be serviced from the top without requiring lateral clearance
3Strength
If the frame structure is manufactured by joining a large number of frame members to support the heavy vacuum chamber and pump, then structural strength is achieved, but device complexity increases
Solution Approach 1:
The frame structure is divided into a plurality of frame members that are joined together to form the complete support structure. This segmentation allows the heavy vacuum chamber and pump to be supported through multiple distributed connection points, achieving the required structural strength while enabling modular assembly and easier manufacturing
Data Source
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AI summary
Provided is a mass spectrometer capable of ensuring a work space for maintenance or the like of a turbomolecular pump as compared with one in the related art. A mass spectrometer 10, 10A, 10B includes: an ion source 30; a vacuum chamber 40 into which a sample ion ionized by the ion source 30 is introduced; and a turbomolecular pump 50, 50A, 50B configured to maintain the vacuum chamber 40 in a vacuum. The turbomolecular pump 50, 50A, 50B is provided above the vacuum chamber 40 in a vertical direction.