Toroidal Plasma Chamber with Integrated Primary Winding
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Solution Overview
Problem
Conventional inductive-coupling plasma generation apparatuses suffer from reduced coupling force due to magnetic flux leakage, which limits the effective use of power for generating toroidal plasma.
Innovation Solution
The apparatus features a chamber with a toroidal electrical discharge space and a power source that generates a high-frequency current flowing in the toroidal direction, reducing magnetic flux leakage by aligning the plasma current and excitation current routes closely with shared central axes, and includes insulating portions to maintain electrical isolation and enhance coupling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the chamber and primary winding are arranged at physically separate positions, then the device structure is simpler, but the coupling force decreases due to magnetic flux leakage
Solution Approach 1:
The patent merges the chamber and primary winding into a single integrated structure where the primary winding is formed on the outer peripheral surface of the chamber. This integration eliminates the physical separation between the chamber and winding, reducing magnetic flux leakage and strengthening the coupling force between the primary and secondary circuits while maintaining structural simplicity.
2Power
If a primary winding is used to generate high-frequency magnetic field, then plasma generation is achieved, but magnetic flux leakage occurs reducing power efficiency
Solution Approach 1:
By integrating the primary winding directly on the chamber surface, the patent minimizes the distance between the primary and secondary circuits, thereby reducing magnetic flux leakage and improving power efficiency.
Solution Approach 2:
The chamber itself serves as an intermediary structure that both contains the plasma and supports the primary winding. This dual-function design reduces energy loss by ensuring close coupling between the magnetic field generation and the plasma processing zone.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration strengthens the coupling, allowing for more effective power utilization and reducing the need for a primary winding, resulting in a more efficient and compact plasma generation system with reduced heat generation and manufacturing costs.
Implementation Method 1
a current (typically a high-frequency current) outputted from the power source flows in the chamber in the toroidal direction. Accordingly, a magnetic flux passing through the center of the chamber changes, and an electric field in the toroidal direction is generated in the electrical discharge space inside of the chamber
Implementation Method 2
Due to the electric field, material gas introduced into the chamber becomes plasma, and thus toroidal plasma is generated
Data Source
AI summary
An inductive-coupling plasma generation apparatus in which coupling can be made stronger and power can be used more effectively than in a conventional technique. The inductive-coupling plasma generation apparatus includes an electroconductive chamber with a toroidal-shaped electrical discharge space formed inside. The plasma generation apparatus also includes a high-frequency power source connected to the chamber. The power source is configured to cause a high-frequency current to flow through electroconductive material forming the chamber along a toroidal direction.