Torque Sensor Silicon Structure Deformation Detection
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Solution Overview
Problem
Conventional torque sensors require numerous strain gauges and complex calibrations, leading to high costs and decreased accuracy due to difficulties in precise attachment, resulting in measurement errors of about 5%.
Innovation Solution
A torque sensor design featuring a cylindrical upper case, an overload prevention member, an elastic structure member with a circular disk shape, and a silicon structure member with a rectangular plate shape, where the silicon structure is inserted into space portions to detect deformation, utilizing deformation sensing units to improve precision and reduce the number of strain gauges needed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple strain gauges are used to measure force and torque, then measurement coverage is improved, but manufacturing cost and complexity increase significantly
Solution Approach 1:
The patent replaces the traditional mechanical strain gauge system with a semiconductor-based sensing system. The elastic structure member generates deformation under load, and this deformation is detected by semiconductor deformation sensing units, eliminating the need for multiple strain gauges and their complex bridge circuit configurations.
Solution Approach 2:
The patent changes the measurement parameter detection method from electrical resistance changes in strain gauges to deformation detection in semiconductor materials. The semiconductor structure member detects deformation through changes in its physical properties, providing a different parameter detection approach that simplifies the overall system.
2Measurement precision
If strain gauges are attached to the elastic structure, then force and torque can be measured, but attachment precision difficulties cause measurement errors
Solution Approach 1:
The patent eliminates the mechanical attachment of strain gauges by using an integrated elastic structure member with embedded deformation sensing units. The semiconductor sensing units are positioned to directly detect deformation of the elastic structure without requiring external strain gauge attachment, thereby avoiding attachment precision issues entirely.
Solution Approach 2:
The patent employs a nested structure where the silicon structure member is inserted into space portions of the elastic structure member. The deformation sensing units are positioned within the elastic structure to directly detect deformation, creating a nested configuration that eliminates the need for external attachments.
3Measurement precision
If 10 to 20 strain gauges are required per sensor, then comprehensive force and torque measurement is achieved, but sensor cost increases
Solution Approach 1:
The patent replaces the expensive strain gauge system requiring 10-20 individual components with a single integrated elastic structure member and semiconductor sensing units. This substitution dramatically reduces component count and assembly complexity, thereby reducing manufacturing cost while maintaining measurement capability.
Solution Approach 2:
The patent merges multiple measurement functions into a single integrated structure. The elastic structure member with embedded silicon structure and deformation sensing units combines force and torque measurement capabilities that previously required multiple separate strain gauges, achieving functional integration and cost reduction.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design enhances measurement precision for force and torque while reducing the size of the sensor and minimizing errors, making it more cost-effective and accurate.
Implementation Method 1
the elastic structure member may be formed to have a circular disk shape and may include: an upper fastening portion and a lower fastening portion locked to the upper case and the lower case
Implementation Method 2
a silicon structure member disposed on the elastic structure member to detect deformation
Data Source
AI summary
Disclosed herein is a torque sensor. The torque sensor includes a cylindrical upper case having one open end and an overload prevention member that is fixed to the upper case to prevent overload. A lower case covers the open end of the upper case and an elastic structure member is disposed on the lower case to detect deformation. Additionally, a silicon structure member is disposed on the elastic structure member to detect deformation.


