Torsion Blade Layout for Hydrogen Turbo-Molecular Pumps
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Solution Overview
Problem
Turbo-molecular pumps designed for high-efficiency argon or nitrogen gas exhaust performance fail to achieve sufficient performance for hydrogen gas, especially under high-temperature, high-flow-rate, and high-back-pressure conditions, resulting in degraded exhaust performance.
Innovation Solution
The turbo-molecular pump is configured with rotor and stator blades having radially-formed torsion blade shapes with varying blade angles, where the non-dimensional parameter X=S/b is optimized across different stages to improve hydrogen gas exhaust performance by adjusting blade angles and numbers, satisfying specific conditions such as Xin<Xc<Xout, Xin<XoutXc>Xout, and other conditions to enhance gas handling capabilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the blade angle is optimized for argon or nitrogen gas exhaust performance, then high-efficiency exhaust performance is achieved for these gases, but sufficient exhaust performance is not obtained for hydrogen gas with small molecular weight
Solution Approach 1:
The patent applies local quality by differentiating blade design parameters across different radial positions. The blade angle is set to be larger at the inner diameter side and smaller at the outer diameter side, creating localized optimization zones that accommodate different gas molecular weights and flow characteristics throughout the blade span, thereby improving hydrogen gas exhaust performance while maintaining compatibility with argon/nitrogen gas performance
Solution Approach 2:
The patent changes geometric parameters of the blade, specifically the blade angle distribution and the non-dimensional parameter X=S/b (where S is inter-blade distance and b is blade length). By optimizing these parameters to satisfy specific relationships (Xin<Xc<Xout or Xin<XoutXc>Xout), the blade design is adapted to handle lighter hydrogen molecules effectively while preserving performance for heavier gases
2Productivity
If the blade design is optimized for high-flow-rate/high-back-pressure conditions, then exhaust performance is improved under these conditions, but exhaust performance for hydrogen gas is significantly degraded under high temperature conditions
Solution Approach 1:
The patent implements local quality by creating distinct blade angle zones along the radial direction. The larger blade angle at the inner diameter handles high-pressure conditions effectively, while the smaller blade angle at the outer diameter maintains performance under high-temperature conditions with lighter hydrogen gas, thus resolving the contradiction between high-flow-rate performance and high-temperature hydrogen performance
Solution Approach 2:
The patent introduces dynamic adaptability through the torsion blade shape where blade angle varies continuously or intermittently from inner to outer diameter. This dynamic geometric configuration allows the blade to respond to different gas densities and thermal conditions at different radial positions, maintaining effective exhaust performance across varying temperature and pressure conditions
Data Source
AI summary
A turbo molecular pump including multiple stages. At least one of the multiple stages of the rotor blades and the multiple stages of the stator blades is configured to satisfy any one of a first condition of Xout<Xc and Xin<Xc, a second condition of α·Xc≥Xin>Xc>Xout where α=1.04, or a third condition of Xin<Xc<Xout≤β·Xc where β=1.04.Xout, Xc and Xin being an inter-blade distance dived by a blade length, at an outer-diameter-side end portion, at an inner-diameter-side portion, and at an intermediate position of each blade, respectively.