Torsion Pump Hose-Winding Mechanism for Chemical Substitution
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Solution Overview
Problem
Mini pumps face challenges in fine process facilities due to poor chemical substitution rates, leading to particle formation from stagnant photosensitive solutions, making them unsuitable for applications like ArF and EUV facilities.
Innovation Solution
A torsion pump design featuring a tube member with a hose wound around a cylindrical drum, driven by a rotational force to change volume, and a sealing case filled with incompressible fluid to enhance chemical substitution efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If mini pumps are used to reduce device size, then the pump size is reduced, but the chemical substitution rate deteriorates leading to particle formation
Solution Approach 1:
The pump employs a rotating drum that dynamically changes the volume of the hose through rotational motion. The hose is periodically compressed and expanded as the drum rotates, creating a peristaltic pumping action that maintains high chemical substitution rates despite the compact pump size.
Solution Approach 2:
The pump utilizes a flexible hose that can be elastically deformed by the rotating drum. The hose's flexibility allows it to be compressed during the pumping cycle while maintaining structural integrity, enabling effective chemical liquid delivery in a miniaturized pump configuration.
2Reliability
If the hose is wound around the drum to change volume, then the chemical substitution rate improves, but the device complexity increases
Solution Approach 1:
The pump design extracts the pumping function from complex mechanical components and achieves it through the simple rotational motion of a drum acting on a flexible hose. This simplifies the overall device structure while maintaining effective chemical substitution rates.
Solution Approach 2:
The flexible hose automatically returns to its original shape after being compressed by the rotating drum, eliminating the need for additional reset mechanisms. The elastic recovery of the hose simplifies the device structure while ensuring continuous pumping action.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Improves chemical substitution rates and reduces pump size, addressing the limitations of mini pumps in fine process facilities by ensuring effective liquid discharge.
Implementation Method 1
a driver configured to provide a rotational force such that the hose is wound around the drum
Implementation Method 2
configured to discharge a chemical liquid through a volume change caused by contraction of the hose wound around the drum
Implementation Method 3
an interior of the sealing case is filled with incompressible fluid
Data Source
AI summary
The present invention provides a pump for supplying a liquid. The pump comprises: a tube member having a hose communicating with a chemical liquid inlet and a chemical liquid outlet, and a cylindrical drum provided to wind the hose, and configured to discharge a chemical liquid through a volume change caused by contraction of the hose wound around the drum; and a driver configured to provide a rotational force such that the hose is wound around the drum.