One-Piece Torsion Spring Element for Compact MEMS Deflection
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Solution Overview
Problem
Micro-electro-mechanical systems (MEMS) require multiple spring mechanisms for various tasks, leading to increased space requirements and process fluctuations, as well as impaired deflection due to combined spring mechanisms.
Innovation Solution
A compact torsion spring element designed in one piece, capable of both rotational and translational movements, comprising a frame structure, anchor structure, and spring structures that allow for integrated rotational and linear movements without additional space or functional impairment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple spring mechanisms are combined to achieve various movements, then functional versatility is improved, but space requirement increases
Solution Approach 1:
The patent combines a torsion spring mechanism and a linear spring mechanism into a single integrated spring element. The torsion spring portion and linear spring portion are connected to form one piece, eliminating the need for separate spring mechanisms while maintaining both rotational and linear movement capabilities. This merging approach achieves functional versatility without increasing space requirements.
Solution Approach 2:
The integrated spring element is designed to perform multiple functions simultaneously - it provides both rotational movement (torsion spring function) and linear movement (linear spring function) through a single structure. This multi-functionality allows the spring element to replace multiple specialized spring mechanisms, achieving versatility without proportionally increasing space occupation.
2Adaptability or versatility
If multiple spring mechanisms are combined, then functional versatility is improved, but manufacturing precision deteriorates due to process fluctuations
Solution Approach 1:
By merging the torsion spring and linear spring into a single integrated element fabricated as one piece, the patent eliminates the need for separate manufacturing processes for each spring mechanism. This unified structure reduces the cumulative effect of process fluctuations that would occur when manufacturing and assembling multiple separate spring mechanisms, thereby improving manufacturing precision.
3Adaptability or versatility
If multiple spring mechanisms are combined, then functional versatility is improved, but deflection performance deteriorates
Solution Approach 1:
The integration of torsion and linear spring portions into a single continuous structure ensures that both spring mechanisms work together synergistically rather than independently. The connected design allows the torsion spring portion and linear spring portion to cooperate in providing both rotational and linear movements, achieving optimal deflection performance that would not be attainable with separate, blocking spring mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The one-piece design enables efficient use of space and stable, multifunctional movements, allowing for complex MEMS components to be connected and operated with maximum deflection and reliability.
Implementation Method 1
the frame structure, with deformation of the spring structures, moves as a whole relative to the anchor structure to produce rotational movements and linear movements of the torsion spring relative to the substrate
Data Source
AI summary
A frame (110) is rotatably coupled to a substrate (200) by way of a torsion spring element (100), wherein the frame (110) can be both twisted in relation to the substrate (200) and moved linearly in relation to said substrate (200). The torsion spring element (100) is made of a single piece and suitable for use in micro-electromechanical devices.