Touch Panel Manufacturing Using Half-Tone Mask Patterning
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Solution Overview
Problem
Conventional touch panel manufacturing requires multiple mask processes, leading to increased production time and cost.
Innovation Solution
A touch panel manufacturing method using only two mask processes, where a half-tone mask is employed to pattern a conductive layer and dielectric layer to form sensing wires and dielectric blocks, with a transparent conductive layer covering them to create a touch sensing structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple mask processes are used to form sensing layers, then manufacturing precision is improved, but production time and cost increase
Solution Approach 1:
The patent combines multiple mask processes into a single mask process. Specifically, the first and second sensing units along with metal sensing wires are formed simultaneously in one mask process, eliminating the need for separate mask processes for each component. This merging reduces production time while maintaining alignment accuracy through the unified patterning approach.
Solution Approach 2:
The single mask process serves multiple functions: it patterns the conductive layer to form metal sensing wires, defines the first sensing units, and creates the structural framework for subsequent layers. This multi-functional mask process replaces what would traditionally require multiple specialized mask steps, reducing both time and complexity.
2Manufacturing precision
If multiple mask processes are used to form sensing layers, then manufacturing precision is improved, but manufacturing cost increases
Solution Approach 1:
By merging multiple mask processes into one, the patent reduces the number of mask materials, alignment procedures, and process steps required. This consolidation directly lowers material costs, reduces equipment usage time, and simplifies the manufacturing workflow, thereby reducing overall manufacturing cost while preserving alignment precision.
Solution Approach 2:
The patent eliminates redundant mask processes and intermediate steps that would traditionally be required. By discarding unnecessary process steps and directly forming multiple structures in one go, the manufacturing process becomes more efficient and cost-effective without sacrificing precision.
3Productivity
If conventional multi-mask processes are used, then sensing layer formation is complete, but dislocation and sharp corners occur
Solution Approach 1:
The unified mask process ensures that metal sensing wires and first sensing units are patterned simultaneously from the same mask template, guaranteeing perfect alignment between them. This eliminates the dislocation issues that arise from sequential mask processes where alignment errors can accumulate between steps.
Solution Approach 2:
The mask process is designed to pre-establish the precise geometric relationships between sensing wires and sensing units before subsequent processing steps. By defining all critical features in one preliminary patterning step, the patent prevents misalignment and sharp corner formation that would occur with multiple sequential steps.
Data Source
AI summary
A manufacturing method of a touch panel is provided. The method includes the following steps. A conductive layer is formed on a substrate, and a dielectric layer is formed to cover the conductive layer. The conductive layer and the dielectric layer are then patterned to respectively form several sensing wires and several dielectric blocks by using a first mask, which is a half-tone mask. Next, a transparent conductive layer is first formed to cover the conductive layer and the dielectric layer, and is then patterned to form a touch sensing structure by using a second mask.