Touch Panel Nanowire Co-etching Electromigration

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Solution Overview

Problem

The manufacturing of touch panels with nanowires faces challenges such as electromigration and the need for aligning space in adhesive processes, which limits their performance and flexibility, particularly in achieving a narrow frame design.

Innovation Solution

A touch panel design featuring a substrate with patterned metal nanowire layers, conductive layers, and insulating layers with specific dielectric constants, along with peripheral wires connected through conductive holes, to inhibit electromigration and enhance the structural integrity and adhesion, allowing for improved performance and flexibility.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If nanowires are used to fabricate touch electrodes, then flexibility and transparency are improved, but electromigration occurs causing component failure and reduced reliability

Engineering Contradiction:
ImproveflexibilityVSAvoidelectromigration resistance
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The patent employs a composite structure combining metal nanowires with conductive polymer layers. The nanowire layer provides flexibility and transparency, while the conductive polymer matrix reinforces the structure and suppresses electromigration by providing alternative current paths and mechanical support. This composite approach resolves the contradiction between flexibility and electromigration resistance.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The conductive polymer layer acts as an intermediary between the nanowires and the environment, protecting the nanowires from direct exposure to moisture and oxygen that accelerate electromigration. The polymer matrix mediates the electrical and mechanical stresses, distributing them uniformly and preventing localized failure that would otherwise occur in pure nanowire structures.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Illumination intensity

If nanowires are used in touch sensors, then transparency and conductivity are achieved, but aligning space is required in adhesive process reducing frame width capability

Engineering Contradiction:
ImprovetransparencyVSAvoidaligning space requirement
Core Design Contradiction:
Illumination intensityVSDevice complexity

Solution Approach 1:

The patent merges the nanowire layer formation with the existing transparent conductive oxide (TCO) layer processing. Both layers are deposited and patterned in the same manufacturing sequence, eliminating the need for separate aligning steps. The nanowire layer is applied over the TCO layer, and both are etched together using a single photolithography and etching process, thereby removing the aligning space requirement and enabling narrow frame designs.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The dual-layer conductive structure serves multiple functions simultaneously: the TCO layer provides the primary conductive network, while the nanowire layer enhances flexibility and maintains transparency. This multi-functional design allows the structure to fulfill electrical, mechanical, and optical requirements without requiring additional alignment processes or increasing device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Illumination intensity

If patterned metal oxide thin films are used, then transparency and conductivity are achieved, but flexibility is limited

Engineering Contradiction:
ImprovetransparencyVSAvoidflexibility
Core Design Contradiction:
Illumination intensityVSAdaptability or versatility

Solution Approach 1:

The patent replaces rigid metal oxide thin films with a flexible nanowire-based conductive layer. The nanowires, being one-dimensional structures with high aspect ratios, can bend and deform without cracking, providing inherent flexibility. When embedded in a flexible substrate and combined with a conductive polymer matrix, the structure achieves both high transparency and superior flexibility, enabling flexible display and touch panel applications.

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The patent changes the fundamental structural parameter of the conductive material from two-dimensional continuous thin films to one-dimensional nanowire networks. This parameter change transforms the mechanical properties from brittle and rigid to flexible and stretchable, while maintaining optical transparency through the nanowire's small cross-sectional area that minimizes light blocking.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively extends the lifetime of silver nanowire components by reducing electromigration and enabling the production of touch panels with improved adhesion and optical clarity, suitable for narrow frame designs.

Implementation Method 1

The insulating layer is made of polymer with a dielectric constant lower than 3.5 or equal to 3.5 under a measuring condition... effectively extends the lifetime of silver nanowire components by reducing electromigration

Methodology Applied
Scientific EffectElectromigration inhibition:

Implementation Method 2

The conductive layer and the second portion of the patterned first metal nanowire layer have a co-etched surface

Methodology Applied
Scientific EffectCo-etching:

Data Source

PatentUS11249605B2Touch panel and manufacturing method thereof
Publication Date: 2022.02.15 PINE CASTLE INVESTMENTS LTD
  • US11249605B2 patent drawing
  • US11249605B2 patent drawing
  • US11249605B2 patent drawing

AI summary

The touch panel includes the substrate, the first touch sensing electrode, the second touch sensing electrode, and the insulating layer. A first peripheral wire and a second peripheral wire are located at a peripheral area of the substrate. A first touch sensing electrode layer includes a first portion of a patterned first metal nanowire layer. The peripheral area includes a co-etched conductive layer and a second portion of the patterned first metal nanowire layer. The conductive layer and the second portion of the patterned first metal nanowire layer have a co-etched surface. The second touch sensing electrode is formed above the insulating layer and is connected with the second peripheral wire. The insulating layer may be made of a low dielectric constant material.