Touch Screen Panel Low Resistance Wiring Layer Etching

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Solution Overview

Problem

Existing touch screen panels face challenges in selectively etching connection lines without damaging touch electrode patterns and achieving adequate conductivity for driving circuit wires, particularly due to the etching of silver nanowire electrode patterns by oxidants used for transparent conductive oxide lines.

Innovation Solution

The solution involves forming a touch screen panel with a substrate having first and second touch electrode patterns and a low resistance wiring layer in the peripheral area, where the connecting line has a higher etching rate than the second transparent conductive wiring layer, and includes a touch insulating member to isolate the first touch electrode pattern from the second, using silver nanowire and transparent conductive oxide materials, and a method of manufacturing that involves sequential lamination and etching processes to protect the electrode patterns during etching.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If oxidant is used to etch transparent conductive oxide connecting line, then connecting line can be etched, but silver nanowire touch electrode patterns are damaged

Engineering Contradiction:
Improveetching processVSAvoidelectrode pattern integrity
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

A protective layer is introduced as an intermediary between the oxidant etching process and the silver nanowire electrode patterns. This protective layer prevents direct contact between the oxidant and the electrode patterns, allowing selective etching of the transparent conductive oxide connecting line while preserving the electrode patterns.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The etching process parameters are changed by controlling the etchant selectivity. By adjusting the etching solution composition and conditions, the etching rate of the transparent conductive oxide is increased relative to the silver nanowire, enabling selective removal of the connecting line material without significantly affecting the electrode patterns.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If conventional wiring layer is used for driving circuit wires, then manufacturing is simpler, but conductivity is insufficient

Engineering Contradiction:
ImproveconductivityVSAvoidwiring layer structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The wiring layer is constructed as a composite structure combining transparent conductive oxide with silver nanowire. This composite material leverages the transparency and processability of TCO while incorporating the high conductivity of silver nanowire, achieving both electrical performance requirements and manufacturing feasibility.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

Different regions of the wiring structure have different material compositions optimized for their specific functions. The driving circuit wiring areas use the composite TCO-silver nanowire structure for high conductivity, while other areas may use simpler TCO-only structures, allowing localized optimization without compromising overall device performance.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for selective etching of the connecting line without damaging the touch electrode patterns and improves the conductivity of the driving circuit wires by using a low resistance wiring layer, enhancing the panel's performance and manufacturing efficiency.

Implementation Method 1

improves conductivity of driving circuit wires by using a low resistance wiring layer

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 2

touch insulating member to isolate the first touch electrode pattern from the second

Methodology Applied
Scientific EffectElectrical insulation: Dielectric

Implementation Method 3

connecting line has a higher etching rate than the second transparent conductive wiring layer

Methodology Applied
Scientific EffectEtching: Erosion

Data Source

PatentUS10013097B2Touch screen panel including touch electrode patterns and driving circuit wirings having a low resistance wiring layer and connected thereto and manufacturing method thereof
Publication Date: 2018.07.03 SAMSUNG DISPLAY CO LTD
  • US10013097B2 patent drawing
  • US10013097B2 patent drawing
  • US10013097B2 patent drawing

AI summary

A touch screen panel and manufacturing method thereof are disclosed. In one aspect, the touch screen panel includes a substrate having a touch area and a peripheral area that surrounds the touch area and a plurality of first touch electrode patterns that are formed in the touch area, extend in a first direction, and are configured to transmit a first touch signal. The touch panel also includes a plurality of second touch electrode patterns that are formed in the touch area, extend in a second direction crossing the first direction, and are configured to transmit a second touch signal and a plurality of first driving circuit wirings that are formed in the peripheral area and are respectively electrically connected to the first touch electrode patterns. The first driving circuit wirings include a low resistance wiring layer.