Transmission Charged Particle Microscopy Imaging via Spatiotemporal Data Sorting

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Solution Overview

Problem

Transmission Charged Particle Microscopes face challenges in acquiring images due to radiation damage, drift, distortion, and aberrations, which are exacerbated by low irradiating beam currents that reduce the Signal-to-Noise Ratio and introduce errors through quantization processes.

Innovation Solution

A method involving particle counting mode data acquisition and outputting spatiotemporal data in raw form, followed by mathematical corrections to assemble images, allowing for accurate identification and mitigation of anomalies such as drift and aberrations, and enabling effective data compression.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If low irradiating beam currents are used to reduce radiation damage, then radiation damage is reduced, but the Signal-to-Noise Ratio deteriorates

Engineering Contradiction:
Improveradiation damageVSAvoidSignal-to-Noise Ratio
Core Design Contradiction:
Object-affected harmful factorsVSMeasurement precision

Solution Approach 1:

The patent applies segmentation by dividing the image acquisition into multiple frames captured at low beam current, then processing these segmented frames through sorting and counting operations to reconstruct the final image with improved signal-to-noise ratio while maintaining low total dose

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent performs preliminary actions by capturing multiple frames at low beam current before final image reconstruction, allowing the system to accumulate sufficient signal through subsequent processing operations while avoiding the harmful effects of high beam current

Inventive Principle:
Principle #10Preliminary action

2Object-affected harmful factors

If low irradiating beam currents are used, then radiation damage is reduced, but quantization errors increase

Engineering Contradiction:
Improveradiation damageVSAvoidquantization errors
Core Design Contradiction:
Object-affected harmful factorsVSManufacturing precision

Solution Approach 1:

The patent segments the low-current signal into multiple frames and applies sorting operations to group similar signals together, reducing quantization errors through statistical accumulation while maintaining low radiation dose

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent implements feedback through iterative sorting and counting operations that refine the image reconstruction, using information from multiple frames to correct quantization errors and improve overall image quality

Inventive Principle:
Principle #23Feedback

3Measurement precision

If multiple frames are captured and processed to improve Signal-to-Noise Ratio, then Signal-to-Noise Ratio is improved, but data storage requirements increase

Engineering Contradiction:
ImproveSignal-to-Noise RatioVSAvoiddata storage requirements
Core Design Contradiction:
Measurement precisionVSQuantity of substance

Solution Approach 1:

The patent extracts only the essential information from multiple frames through sorting and counting operations, discarding redundant data while preserving the signal needed for high-quality image reconstruction, thereby reducing storage requirements

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent discards redundant information from multiple frames through processing operations that extract only the necessary signal components, recovering the essential image data in a compressed form that requires less storage space

Inventive Principle:
Principle #34Discarding and recovering

4Measurement precision

If drift and aberrations are corrected through processing, then imaging precision is improved, but processing complexity increases

Engineering Contradiction:
Improveimaging precisionVSAvoidprocessing complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent segments the correction process into distinct sorting and counting operations that address drift and aberrations separately, making the complex correction task more manageable and computationally efficient

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent performs preliminary sorting operations on the captured frames before final image reconstruction, pre-correcting for drift and aberrations in a way that simplifies subsequent processing steps

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach preserves data integrity, facilitates accurate correction of imaging anomalies, and achieves significant data compression, improving the Signal-to-Noise Ratio and reducing storage and processing requirements.

Implementation Method 1

Using an illumination system to direct a beam of charged particles from a source onto said specimen

Methodology Applied
Scientific EffectElectromagnetic acceleration and focusing: Electromagnetic Induction

Implementation Method 2

Using an imaging system to direct charged particles that are transmitted through the specimen onto a detector

Methodology Applied
Scientific EffectElectromagnetic focusing and deflection: Lorentz Force

Data Source

PatentUS10825647B2Innovative imaging technique in transmission charged particle microscopy
Publication Date: 2020.11.03 FEI CO
  • US10825647B2 patent drawing
  • US10825647B2 patent drawing

AI summary

A method of using a Transmission Charged Particle Microscope, comprising:Providing a specimen on a specimen holder;Using an illumination system to direct a beam of charged particles from a source onto said specimen;Using an imaging system to direct charged particles that are transmitted through the specimen onto a detector,further comprising the following actions:In an acquisition step, lasting a time interval T, using said detector in particle counting mode to register spatiotemporal data relating to individual particle detection incidences, and to output said spatiotemporal data in raw form, without assembly into an image frame;In a subsequent rendering step, assembling a final image from said spatiotemporal data, while performing a mathematical correction operation.