Transceiver Chip Deep Well Isolation for Cross-Talk Mitigation

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Solution Overview

Problem

Cross-talk between co-existing high-speed transceiver chains in millimeter-wave frequency ranges degrades signal integrity and reduces die-level bandwidth density, leading to potential false signaling in inactive links.

Innovation Solution

The implementation of embedded deep wells and through-substrate vias (TSVs) for improved radio frequency isolation between transceiver components, combined with backend interconnects to the bump-level of the chip, enhances electrical isolation and mitigates cross-talk, while deep-well implants provide local isolation between transceiver components.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If transceiver chains are co-integrated at die-level to increase bandwidth density, then productivity and device integration are improved, but cross-talk between chains degrades signal integrity and causes false signaling

Engineering Contradiction:
Improvebandwidth densityVSAvoidsignal integrity
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

A deep well structure filled with doped semiconductor material is introduced as an intermediary element between adjacent transceiver chains. This deep well acts as a mediator that absorbs and shields electromagnetic signals, preventing cross-talk while allowing the transceiver chains to remain co-integrated at die-level for high bandwidth density.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The harmful electromagnetic interference between transceiver chains is extracted and isolated by removing and containing it within the deep well structure. The deep well extracts the cross-talk signals from the operational environment of the transceiver chains and confines them to a dedicated isolation region, preventing false signaling.

Inventive Principle:
Principle #2Taking out (Extraction)

2Reliability

If transceiver chains are spaced apart to reduce cross-talk, then signal integrity is improved, but die-level bandwidth density decreases

Engineering Contradiction:
Improvesignal integrityVSAvoidbandwidth density
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The isolation mechanism transitions from two-dimensional lateral spacing to three-dimensional vertical depth. Instead of increasing horizontal distance between transceiver chains, the deep well extends vertically into the substrate, providing isolation through the third dimension. This allows transceiver chains to maintain close horizontal spacing for high bandwidth density while achieving adequate isolation through the deep well's vertical structure.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The deep well structure is nested within the substrate beneath the transceiver chains, creating a hierarchical isolation architecture. The well is formed by etching into the substrate and filling with doped material, nesting the isolation function within the existing device footprint without requiring additional lateral space.

Inventive Principle:
Principle #7Nested doll (Nesting)

3Reliability

If deep wells are implemented for RF isolation, then cross-talk mitigation is improved, but device complexity and manufacturing steps increase

Engineering Contradiction:
Improvecross-talk mitigationVSAvoidmanufacturing complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The deep well formation process is merged with the existing semiconductor manufacturing flow by integrating ion implantation and annealing steps into standard process sequences. The doped material filling and well formation are combined with existing substrate preparation and transistor fabrication steps, reducing the need for separate dedicated processing equipment and tooling.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The electrical properties of the deep well are optimized by adjusting doping concentration and well depth parameters. By changing these physical parameters, the isolation effectiveness is tuned to achieve adequate cross-talk mitigation with minimal well dimensions, thereby reducing manufacturing complexity and process variation sensitivity.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively increases die-level bandwidth density, improves signal integrity, and achieves cost and power efficiencies, while also providing thermal isolation and heat dissipation paths, enhancing overall device reliability.

Implementation Method 1

the well material includes an n-doped or p-doped portion of substrate material, and the well material is to electromagnetically shield the first transceiver component from the second transceiver component

Methodology Applied
Scientific EffectElectromagnetic shielding: Faraday Cage

Data Source

PatentUS10819445B2Waveguide and transceiver interference mitigation
Publication Date: 2020.10.27 INTEL CORP
  • US10819445B2 patent drawing
  • US10819445B2 patent drawing
  • US10819445B2 patent drawing

AI summary

Embodiments may relate to a transceiver chip. The transceiver chip may include a substrate that has a first transceiver component and a second transceiver component positioned therein. The transceiver chip may further include a well material that is positioned between the first transceiver component and the second transceiver component. The well material may mitigate cross-talk between the first transceiver component and the second transceiver component. Other embodiments may be described or claimed.