Transducer Cavity Passivation for Reliable, Simpler Manufacturing
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Solution Overview
Problem
Existing transducers face cumbersome preparation processes and poor device reliability.
Innovation Solution
A transducer design comprising a substrate with transducer elements featuring a bottom electrode, an oscillatory element with a cavity, a top electrode overlapped in the top view direction, and a passivation layer that extends from the oscillatory element to the bottom electrode through the cavity, enhancing device reliability and simplifying manufacturing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If traditional transducer structures are used, then manufacturing processes become cumbersome and complex, but device reliability remains poor
Solution Approach 1:
The patent merges the passivation layer function with the cavity sealing function by extending the passivation layer continuously from the oscillatory element through the opening to the bottom electrode, creating a unified protective structure that simplifies manufacturing while ensuring reliability
Solution Approach 2:
The transducer element is segmented into distinct functional layers (bottom electrode, oscillatory element, top electrode, passivation layer) with clear interfaces, allowing each component to be optimized independently while maintaining overall device reliability and simplifying the manufacturing process
2Reliability
If a passivation layer is added to cover the oscillatory element and top electrode, then device reliability improves, but manufacturing complexity increases
Solution Approach 1:
The passivation layer is designed to perform multiple functions simultaneously: protecting the top electrode and oscillatory element, sealing the cavity, and providing mechanical support, thereby improving reliability without adding separate structural components
Solution Approach 2:
The passivation layer serves as a multi-functional component that provides electrical insulation, mechanical protection, cavity sealing, and structural support, reducing the need for additional specialized components and simplifying the overall device structure
3Productivity
If the passivation layer extends continuously through the cavity, then vibration efficiency is enhanced, but the preparation process becomes more cumbersome
Solution Approach 1:
The passivation layer is formed to extend continuously through the cavity during the electrode deposition process, preliminarily establishing the protective and sealing structure before final device assembly, which enhances vibration efficiency while avoiding subsequent complex sealing operations
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design improves transducer reliability and simplifies the manufacturing process by using a passivation layer to cover the oscillatory element and top electrode, forming a closed structure that enhances vibration efficiency and reduces manufacturing complexity.
Implementation Method 1
A transducer, such as an ultrasonic transducer, can have functions such as measuring the distance of an object by emitting and receiving ultrasonic waves
Implementation Method 2
a passivation layer disposed on the oscillatory element and the top electrode and in the opening of the oscillatory element
Data Source
AI summary
A transducer includes: a substrate; and a plurality of transducer elements disposed on the substrate, and each transducer element including: a bottom electrode; an oscillatory element disposed on the bottom electrode and having an opening, wherein there is a cavity between the bottom electrode and the oscillatory element; a top electrode disposed on the oscillatory element, wherein the top electrode and the bottom electrode are overlapped in a top view direction; and a passivation layer disposed on the oscillatory element and the top electrode and in the opening of the oscillatory element, wherein the passivation layer extends continuously from a position on the oscillatory element to a position on the bottom electrode through the opening and the cavity.