Magnetic Recording Transducer Fabrication via Damascene Process
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Solution Overview
Problem
The conventional method for fabricating magnetic recording transducers is complex and time-consuming, leading to potential errors and compromised performance due to numerous steps and complex processing.
Innovation Solution
A method that involves providing an etch stop layer and a nonmagnetic etchable layer, forming a pole trench with a pole tip region in the side shield layer and a yoke region in the etchable layer, and using a reactive ion etch to create a transducer with a write gap and trailing shield, simplifying the fabrication process and reducing errors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the conventional method is used to fabricate magnetic recording transducers with side shields, then the transducer components can be formed, but the fabrication process becomes complex and time-consuming
Solution Approach 1:
The patent combines the formation of side shields and pole trenches into a single integrated process step. The side shields are deposited as a continuous layer that is then patterned together with the pole trench definition, eliminating the need for separate side shield deposition and pole trench etching steps. This merging of operations reduces process complexity while maintaining component precision.
Solution Approach 2:
The patent performs preliminary deposition of the side shield layer before defining the pole trench geometry. By having the side shield material already in place as an etch stop layer, subsequent processing steps can proceed more efficiently without requiring additional deposition steps after trench formation. This preliminary action simplifies the overall fabrication sequence.
2Manufacturing precision
If the conventional method is used to fabricate magnetic recording transducers, then transducer components can be formed, but the fabrication time increases
Solution Approach 1:
The patent merges multiple fabrication operations into fewer integrated steps. The side shield deposition and pole trench formation are combined into a single process flow, reducing the total number of sequential steps required. This integration directly reduces fabrication time while maintaining the precision needed for transducer components.
Solution Approach 2:
The patent establishes a continuous fabrication process where each step flows directly into the next without interruption. The side shield layer serves as both a structural component and an etch stop, allowing continuous processing without intermediate handling or repositioning. This continuity eliminates idle time between operations and accelerates overall production.
3Manufacturing precision
If complex processing steps are used to form transducer components, then component formation can be achieved, but errors increase
Solution Approach 1:
The patent combines side shield formation and pole trench definition into a single patterning operation. By using the side shield layer as an etch stop during trench formation, the process eliminates the need for separate alignment and registration steps that would otherwise be required. This reduction in process steps directly lowers the probability of errors occurring.
Solution Approach 2:
The side shield layer serves as an intermediary etch stop layer that mediates between the pole structure and underlying layers. This intermediary layer provides a well-defined stopping point for etching, ensuring precise trench depth control without requiring complex monitoring or adjustment mechanisms. The intermediary simplifies the process while maintaining precision and reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method reduces fabrication time and resources, minimizes unwanted artifacts, and improves the performance of the transducer by simplifying the process and ensuring precise formation of the transducer components.
Implementation Method 1
forming a pole trench with a pole tip region in the side shield layer and a yoke region in the etchable layer, and using a reactive ion etch to create a transducer
Implementation Method 2
providing an etch stop layer and a nonmagnetic etchable layer on the etch stop layer. A side shield layer is provided
Data Source
AI summary
A method fabricates a magnetic transducer having a nonmagnetic layer and an ABS location corresponding to an ABS. Etch stop and nonmagnetic etchable layers are provided. A side shield layer is provided between the ABS location and the etch stop and etchable layers. A pole trench is formed in the side shield and etchable layers. The pole trench has a pole tip region in the side shield layer and a yoke region in the etchable layer. A nonmagnetic side gap layer, at least part of which is in the pole trench, is provided. A remaining portion of the pole trench has a location and profile for a pole and in which at least part of the pole is formed. A write gap and trailing shield are provided. At least part of the write gap is on the pole. At least part of the trailing shield is on the write gap.