Electromechanical Transducer Electrode Structure for Stable Ink Discharging
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Solution Overview
Problem
Existing ink-jet recording technologies face challenges in achieving stable ink discharging characteristics due to the degradation of fatigue characteristics in piezoelectric materials, particularly with the use of PZT, and the high specific resistance of oxide electrodes, leading to unstable voltage distribution and displacement in piezoelectric elements.
Innovation Solution
A manufacturing method for an electromechanical transducing device that includes a substrate with a metal first electrode, an oxide second and third electrode, and an electromechanical transducing film, where surface modification materials are used to enhance the hydrophilic and hydrophobic properties, allowing for stable ink discharging by avoiding Pb diffusion and ensuring sufficient electric current supply.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an oxide electrode is used to improve fatigue characteristics of PZT, then reliability is improved, but electrical conductivity deteriorates due to high specific resistance
Solution Approach 1:
The invention uses a composite electrode structure consisting of a metal layer (first electrode) and an oxide layer (second electrode) formed on the same substrate. The metal layer provides low specific resistance and high electrical conductivity, while the oxide layer provides barrier properties to prevent Pb diffusion and improve fatigue characteristics. This composite structure simultaneously achieves both electrical conductivity and reliability requirements.
Solution Approach 2:
The electrode is divided into two functional segments: a metal electrode segment for electrical conduction and an oxide electrode segment for protection and fatigue resistance. This segmentation allows each layer to perform its specialized function without compromising the other, resolving the contradiction between conductivity and reliability.
2Object-affected harmful factors
If a metal electrode is used to ensure low specific resistance, then electrical conductivity is improved, but fatigue characteristics of PZT deteriorate due to Pb diffusion
Solution Approach 1:
The invention uses a composite electrode structure consisting of a metal layer (first electrode) and an oxide layer (second electrode) formed on the same substrate. The metal layer provides low specific resistance and high electrical conductivity, while the oxide layer provides barrier properties to prevent Pb diffusion and improve fatigue characteristics. This composite structure simultaneously achieves both electrical conductivity and reliability requirements.
Solution Approach 2:
The oxide layer acts as an intermediary barrier between the metal electrode and the PZT piezoelectric layer. It prevents direct contact and Pb diffusion while allowing electrical field penetration, thus protecting the PZT from degradation caused by metal electrode interaction.
3Manufacturing precision
If lithography method is used to form piezoelectric elements, then manufacturing precision is improved, but productivity deteriorates due to complicated processes and long tact time
Solution Approach 1:
The invention replaces the mechanical lithography process with an inkjet printing process for forming piezoelectric elements. The inkjet method uses non-contact droplet deposition to directly write patterns, eliminating the need for mechanical photoresist coating, exposure, and development steps. This substitution maintains manufacturing precision while dramatically reducing process complexity and tact time.
Solution Approach 2:
The invention extracts and removes the photoresist processing steps from the manufacturing process. By using inkjet printing to directly deposit piezoelectric material in the desired pattern, the complex lithography sequence (coating, exposure, development, etching) is replaced with a single printing step, significantly improving productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method achieves stable ink discharging characteristics and improved durability by preventing Pb diffusion and maintaining low specific resistance, ensuring consistent performance even with multiple piezoelectric elements driven simultaneously.
Implementation Method 1
an elecromechanical transducing device such as a piezoelectric element pressurizing the ink in the pressurization chamber
Data Source
AI summary
A manufacturing method of an electromechanical transducing device includes forming a vibration plate on a substrate; forming a first electrode made of a metal on the vibration plate; forming a second electrode made of an electrically conductive oxide on the first electrode; coating a surface modification material and carrying out surface modification of only the first electrode; forming an electromechanical transducing film on the second electrode; and forming a third electrode made of an electrically conductive oxide on the electromechanical transducing film.