Electroacoustic Transducer Pivot Articulation Seal
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Solution Overview
Problem
Current manufacturing methods for MEMS/NEMS microphones face challenges in preventing air leaks between different volumes of the electroacoustic transducer, which affects the integrity and performance of the device.
Innovation Solution
A manufacturing method involving a stack of substrates and sacrificial layers is used to form a membrane and rigidification structure, where etching techniques are carefully controlled to separate and expose layers without compromising the seal between zones, ensuring the integrity of the first transmission arm and reducing the risk of air leaks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If traditional trimming and delimiting steps are used to make transmission arms movable, then the transmission arms can rotate with respect to the frame, but air leaks occur between the cavity subjected to atmospheric pressure and the rear volume of the microphone
Solution Approach 1:
The patent segments the transmission arm structure into multiple parts: a first transmission arm portion in the first zone, a second transmission arm portion in the second zone, and a pivot articulation connecting them. This segmentation allows each part to be optimized independently - the pivot articulation provides the sealing function while the arm portions provide the transmission function, resolving the contradiction between movability and seal integrity.
Solution Approach 2:
The pivot articulation acts as an intermediary element between the first and second transmission arm portions. It serves as a mediator that enables rotation and movement while simultaneously maintaining the seal between the two zones. The pivot articulation includes a sealing membrane that prevents air leaks while allowing the necessary mechanical movement.
2Productivity
If the piston is trimmed and transmission arms are delimited to enable movement, then the transmission mechanism can function, but substantial air leaks are created between different volumes
Solution Approach 1:
The sealing membrane is integrated into the pivot articulation structure from the beginning, before the transmission arms are assembled and before any trimming operations are performed. This preliminary incorporation of the sealing function ensures that the seal is already in place and protected during subsequent manufacturing steps, preventing air leaks while maintaining transmission mechanism functionality.
Solution Approach 2:
The pivot articulation is formed as a composite structure combining rigid elements (for mechanical strength and movement) with a flexible sealing membrane (for preventing air leaks). This composite approach allows the single component to simultaneously provide both the mechanical transmission function and the sealing function, eliminating the contradiction between functionality and leak prevention.
3Reliability
If a sealed environment is maintained between zones, then air leaks are prevented, but the complexity of the manufacturing process increases
Solution Approach 1:
The patent merges the sealing function with the mechanical transmission function by integrating the sealing membrane directly into the pivot articulation structure. This consolidation eliminates the need for separate sealing components and assembly steps, reducing manufacturing complexity while maintaining the sealed environment between zones. The single pivot articulation component performs both sealing and movement transmission functions.
Data Source
AI summary
A method for manufacturing an electroacoustic transducer includes a frame; an element movable with respect to the frame, the movable element including a membrane and a structure for rigidifying the membrane; a first transmission arm, the movable element being coupled to an end of the first transmission arm; wherein the trimming of the membrane and the trimming of the rigidification structure are decorrelated in a region around an intersection between the position of the first transmission arm and the periphery of the rigidification structure.