Ultrasonic Transducer Capacitor Protrusions Cavity
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Solution Overview
Problem
Current ultrasonic transducer devices face challenges in increasing the sensitivity and efficiency of ultrasonic signals, which affects the quality of ultrasonic images.
Innovation Solution
The ultrasonic transducer device incorporates a substrate with an ultrasonic oscillation unit that includes a first and second electrode layer, insulating layers, capacitor protrusions, and a cavity. The capacitor protrusions are disposed within the cavity, increasing the capacitance and enhancing the sensitivity and efficiency of the ultrasonic oscillation unit.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the capacitance of the ultrasonic oscillation unit is increased to improve sensitivity and efficiency, then the quality of ultrasonic signals and images is improved, but the device structure becomes more complex
Solution Approach 1:
The capacitor protrusions are nested within the cavity formed between the first and second insulating layers, allowing the capacitance-increasing structure to be integrated within the existing device footprint without adding external components. This nesting approach increases capacitance while avoiding proportional increases in overall device complexity.
Solution Approach 2:
The invention transitions from a planar capacitor structure to a three-dimensional structure by forming protrusions that extend into the cavity space. This dimensional change allows capacitance to be increased by utilizing vertical space within the existing layer structure, rather than requiring larger lateral dimensions or additional parallel capacitor units.
2Reliability
If capacitor protrusions are added to increase capacitance, then the sensitivity and efficiency are improved, but the manufacturing process becomes more complex
Solution Approach 1:
The capacitor protrusions are formed by combining the first and second insulating layers in a stacked configuration with a cavity between them. This merging of layers into a multi-layer capacitor structure allows capacitance to be increased through the integration of existing manufacturing processes for forming insulating layers, rather than requiring entirely new manufacturing steps.
Solution Approach 2:
The protrusions are nested within the cavity space defined by the insulating layers, allowing the capacitance-increasing feature to be formed using the same lithography and etching processes that define the cavity itself. This nesting approach enables capacitance enhancement without requiring separate manufacturing sequences.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration increases the capacitance of the ultrasonic oscillation unit by approximately 25%, leading to improved sensitivity and efficiency, which enhances the quality of ultrasonic signals and images.
Implementation Method 1
The capacitance of the oscillation element is increased by disposing a plurality of capacitor protrusions in the cavity
Data Source
AI summary
An ultrasonic transducer device including a substrate and an ultrasonic oscillation unit is provided. The ultrasonic oscillation unit is disposed on the substrate. The ultrasonic oscillation unit includes a first electrode layer, a first insulating layer, a second electrode layer, a second insulating layer, a plurality of capacitor protrusions, and a cavity located between the first insulating layer and the second insulating layer. The capacitor protrusions are disposed in the cavity by being disposed on at least one of the first insulating layer and the second insulating layer. The first insulating layer and the second insulating layer are separated by a gap and are located between the first electrode layer and the second electrode layer. The height of each of the capacitor protrusions is less than a height of the gap.