Magnetic Recording Transducer Side Shield Fabrication
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Solution Overview
Problem
Conventional methods for fabricating magnetic recording heads with side shields face challenges at higher recording densities, including pole collapse and difficulty in achieving desired profiles, which affect yield and performance.
Innovation Solution
A method involving a negative mask with a wider top than bottom, a nonmagnetic layer, and side shield materials, where the mask is removed to create trenches and control the profile of the side shields, allowing for better control over the main pole's track width and reducing stray fields.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If conventional methods are used to deposit magnetic layers and trim to form PMR poles, then the process is simple and straightforward, but at higher recording densities the pole collapses and yield decreases
Solution Approach 1:
The patent applies preliminary action by forming the side shields and nonmagnetic layers around the pole structure before final pole formation. The side shields are deposited and patterned first, then the pole is formed within the defined space, preventing collapse by establishing structural boundaries in advance
Solution Approach 2:
The patent introduces nonmagnetic layers as intermediary structures between the pole and side shields. These nonmagnetic layers act as spacers and structural support elements that prevent the pole from collapsing while maintaining the desired track width at high recording densities
2Manufacturing precision
If aluminum oxide RIE is used to form trenches and plate the pole, then wrap-around shields can be formed, but control of aluminum oxide removal to achieve desired profile is problematic
Solution Approach 1:
The patent changes the material parameter from aluminum oxide to a different nonmagnetic material that can be selectively removed with better profile control. This material substitution enables more precise control over the side shield profile while simplifying the overall fabrication process
Solution Approach 2:
The patent replaces the mechanical RIE trench formation process with a deposition-based approach where side shields are deposited conformally and then selectively removed. This substitution of the fabrication mechanism enables better profile control without the complexities of precise RIE parameter management
3Stability of the object's composition
If the conventional PMR pole top is made wider than the bottom to provide stability, then structural stability is improved, but the pole width becomes insufficient at higher densities causing collapse
Solution Approach 1:
The patent applies asymmetry by creating side shields with different profiles at the top and bottom of the pole. The side shields extend further at the bottom to provide structural support and prevent collapse, while maintaining adequate track width at the top for high-density recording, achieving both stability and narrow width through asymmetric design
Data Source
AI summary
A method for manufacturing a magnetic transducer is described. The method includes providing a negative mask having a bottom, a plurality of sides, and a top wider than the bottom. The method also includes depositing a nonmagnetic layer on the negative mask. The nonmagnetic layer has a plurality of portions covering the plurality of sides of the negative mask. The method also includes providing a first mask having a first trench therein. The negative mask resides in the first trench. The method further includes depositing side shield material(s), at least a portion of which resides in the first trench. The method further includes removing the negative mask to create a second trench between the plurality of portions of the nonmagnetic layer and form a pole, at least a portion of which resides in the second trench.