Articulated Transfer Arm Expansion Calculation for Thermal Positioning Error
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Solution Overview
Problem
Existing transfer devices for substrates, such as semiconductor wafers, face errors in positioning due to thermal expansion of articulated arms during high-temperature processing, where the expansion amount of each arm is not accurately determined, leading to positioning errors.
Innovation Solution
A transfer device comprising an articulated arm with rotatable joints, a detector to measure rotation angles in different postures, and a calculator to determine the expansion amount of each arm based on these angles, allowing for precise calculation and correction of thermal expansion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the articulated arm is used for substrate transfer, then substrate transfer function is achieved, but positioning accuracy deteriorates due to thermal expansion
Solution Approach 1:
The system detects the actual expansion amount of each arm through rotation angle measurements in multiple postures and uses this feedback information to correct positioning errors, thereby maintaining positioning accuracy despite thermal expansion
Solution Approach 2:
The system changes the physical state measurement by detecting rotation angles at different temperatures and postures, calculating expansion amounts based on these parameter changes, and using the calculated parameters for correction
2Measurement precision
If rotation angles are detected in multiple postures, then expansion amount calculation accuracy is improved, but measurement complexity increases
Solution Approach 1:
The measurement process is segmented into multiple discrete postures, with each posture providing specific expansion information. By dividing the complex expansion measurement into manageable posture-specific measurements, the system achieves accurate expansion calculation while organizing complexity into structured segments
3Ease of operation
If thermal expansion is not corrected, then device operation is simple, but positioning error increases
Solution Approach 1:
The system performs self-correction by automatically detecting its own expansion through rotation angle measurements, calculating the expansion amounts, and applying corrections without external intervention, thereby maintaining simplicity while improving precision
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate determination and correction of arm expansion, thereby suppressing positioning errors caused by thermal expansion, ensuring precise substrate transfer and processing.
Implementation Method 1
determining thermal expansion of an arm of a transfer device at the time of automatically centering a substrate
Implementation Method 2
calculate an expansion amount of each of the arms based on the rotation angles of the joints in each posture detected by the detector
Data Source
AI summary
In the present invention, an articulated arm is configured so that a plurality of arms are connected by rotatable joints, and by rotating the joints, the articulated arm can be extended and contracted. A detection unit detects the angle of rotation of the joints of the articulated arm, for different postures the number of which is at least the number of arms of the articulated arm. A calculation unit calculates the expansion amount of each of the plurality of arms on the basis of the angle of rotation of the joints at each of the postures detected by the detection unit.