Transfer Arm Reflection Sensing for Precise Substrate Passage Detection
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Solution Overview
Problem
Existing transfer apparatuses struggle to accurately determine whether a substrate has passed through a predetermined area, particularly in complex configurations with multiple processing modules and load lock modules.
Innovation Solution
The proposed transfer apparatus includes a transfer arm, an irradiator, a light receiver, and a controller. The irradiator irradiates light obliquely onto a passage area, and the light receiver detects the reflected light. The controller determines whether the substrate has passed through the area by assessing the reception of light by the light receiver.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a light-blocking detection method is used to determine substrate passage, then the detection principle is simple, but the measurement precision is insufficient in complex configurations
Solution Approach 1:
The patent replaces the conventional light-blocking detection method with a light reflection detection method. Instead of detecting substrate passage by blocking light between a projector and receiver, the system irradiates light onto the substrate surface and detects the reflected light. This substitution of detection mechanism improves measurement precision while maintaining relatively simple device complexity, as the fundamental optical setup remains straightforward but the detection principle is enhanced.
Solution Approach 2:
The patent utilizes changes in light reflection characteristics (analogous to color changes in the broader sense of optical property changes) to detect substrate passage. By monitoring the reflected light intensity or characteristics from the substrate surface, the system can accurately determine when the substrate enters or exits the processing module, improving detection accuracy without requiring complex mechanical or optical arrangements.
2Adaptability or versatility
If multiple processing modules and load lock modules are configured, then the system versatility is improved, but the difficulty of detecting and measuring substrate passage increases
Solution Approach 1:
The patent applies segmentation by providing separate light irradiation and detection systems for each processing module and load lock module. Each module has its own light source and detector positioned to monitor substrate passage at that specific location. This segmented approach allows the system to maintain high versatility with multiple modules while keeping the detection difficulty manageable, as each detection point operates independently with a clear, localized detection zone.
Solution Approach 2:
The patent uses the substrate itself as an intermediary in the detection process. By irradiating light onto the substrate and detecting the reflected light, the substrate becomes part of the detection mechanism. This intermediary approach simplifies detection in complex multi-module configurations, as the substrate's presence or absence in each module can be detected independently through its reflection characteristics, without requiring complex coordination between multiple detection systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables precise determination of substrate passage through predetermined areas, even in complex configurations, thereby improving process accuracy and efficiency.
Implementation Method 1
The light receiver receives the light, which is irradiated from the irradiator and reflected from the member
Data Source
AI summary
A transfer apparatus includes a transfer arm, an irradiator, a light receiver, and a controller. The transfer arm transfers the member. The irradiator irradiates light obliquely onto a passage area, through which the member passes, when the member is transferred by the transfer arm. The light receiver receives the light, which is irradiated from the irradiator and reflected from the member, when the member passes through the passage area. The controller determines whether the member has passed through the passage area according to whether the light irradiated from the irradiator is received by the light receiver.