Transfer Arm Warp Compensation via Dynamic Magnetic Force
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Solution Overview
Problem
Existing transfer apparatuses face challenges in reducing the downward inclination of the front end of a transfer arm due to warping, which can lead to precision issues during substrate handling in plasma processing systems.
Innovation Solution
A transfer apparatus equipped with a transfer arm, arm shaft, and a magnetic field control unit that uses electromagnets to apply an upward force, increasing the magnetic field strength as the arm extends, thereby reducing the downward inclination of the front end of the transfer arm.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of moving object
If the transfer arm is extended to increase the length from the arm shaft to the front end, then the substrate transfer range is improved, but the downward inclination due to warp increases
Solution Approach 1:
The electromagnets generate an upward magnetic force on the transfer arm to counteract the downward gravitational force and the downward inclination caused by arm warp. This anti-weight approach directly compensates for the harmful effect of gravity and structural deformation, maintaining the front end at the correct position even when the arm is extended.
Solution Approach 2:
The control unit dynamically adjusts the current supplied to the electromagnets based on the position of the transfer arm. When the arm is extended, the current is increased to generate a stronger upward magnetic force, compensating for the increased downward inclination. This parameter change allows the system to adapt to different arm positions and maintain precision throughout the full range of motion.
2Manufacturing precision
If electromagnets are used to apply upward force to the transfer arm, then the downward inclination is reduced, but the device complexity increases
Solution Approach 1:
The electromagnets serve multiple functions: they generate the upward magnetic force to counteract arm warp and inclination, and they are integrated into the existing magnetic field system of the plasma processing apparatus. The control unit utilizes position information already available from the transfer arm's movement to dynamically adjust the magnetic force, combining multiple functions into a unified system that reduces overall complexity.
Solution Approach 2:
The control unit automatically adjusts the current to the electromagnets based on the transfer arm's position without requiring external intervention. The system uses the position information of the pick unit to determine the appropriate magnetic force level, enabling self-regulation and reducing the need for additional complex control mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces the downward inclination of the transfer arm, enhancing precision and stability during substrate transfer and plasma processing by maintaining a stable magnetic field.
Implementation Method 1
The plurality of electromagnets apply a force in upward direction to the transfer arm by generating a magnetic field in the case
Implementation Method 2
The plurality of electromagnets apply a force in upward direction to the transfer arm by generating a magnetic field in the case
Implementation Method 3
The plurality of electromagnets generate a magnetic field in the processing container
Data Source
AI summary
A transfer apparatus transfers an object to be transferred onto a case. The transfer apparatus includes a transfer arm, an arm shaft, a plurality of electromagnets, and a control unit. The transfer arm has a pick unit on a front end thereof and extends and retracts in a horizontal direction. The object to be transferred is held on the pick unit. The arm shaft supports the transfer arm. The plurality of electromagnets apply an force in upward direction to the transfer arm by generating a magnetic field in the case. The control unit controls the plurality of electromagnets in such a manner that when the transfer arm extends and retracts in the horizontal direction, the force in upward direction applied to the transfer arm increases as a length from the arm shaft to the front end of the transfer arm increases.