Transfer chamber
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Solution Overview
Problem
Existing transfer chambers face challenges in replacing gas processing devices without disrupting the internal atmosphere, leading to increased stop times and gas consumption during filter replacements, which can introduce particles and compromise cleanliness.
Innovation Solution
A transfer chamber design with a circulation path and connecting/disconnecting means for the gas processing device, allowing for replacement without exposing the internal atmosphere to external air, and a gas purge system to maintain cleanliness and efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the chemical filter is replaced by opening the entire transfer chamber, then the chemical filter can be replaced, but the transfer process must be stopped and particles may enter the transfer chamber
Solution Approach 1:
The transfer chamber is divided into a chamber body and a separately replaceable gas processing device module. The gas processing device can be replaced by accessing only the module section rather than opening the entire chamber, allowing filter replacement without stopping the transfer process and preventing particle contamination from chamber opening.
Solution Approach 2:
The gas processing device is extracted as a separate replaceable module from the main chamber body. This extraction allows the filter to be replaced by removing only the gas processing module rather than opening the entire chamber, maintaining transfer process continuity and preventing contamination.
2Ease of repair
If the chemical filter is replaced by opening the entire transfer chamber, then the chemical filter can be replaced, but the stop time until the transfer process is resumed becomes long and consumption of gas increases
Solution Approach 1:
The transfer chamber is divided into a chamber body and a separately replaceable gas processing device module. The gas processing device can be replaced by accessing only the module section rather than opening the entire chamber, allowing filter replacement without stopping the transfer process and preventing particle contamination from chamber opening.
Solution Approach 2:
The gas processing device is extracted as a separate replaceable module from the main chamber body. This extraction allows the filter to be replaced by removing only the gas processing module rather than opening the entire chamber, maintaining transfer process continuity and preventing contamination.
3Ease of repair
If the chemical filter is replaced by opening the entire transfer chamber, then the chemical filter can be replaced, but consumption of gas increases which causes an increase in cost
Solution Approach 1:
The transfer chamber is divided into a chamber body and a separately replaceable gas processing device module. The gas processing device can be replaced by accessing only the module section rather than opening the entire chamber, allowing filter replacement without stopping the transfer process and preventing particle contamination from chamber opening.
Solution Approach 2:
The gas processing device is extracted as a separate replaceable module from the main chamber body. This extraction allows the filter to be replaced by removing only the gas processing module rather than opening the entire chamber, maintaining transfer process continuity and preventing contamination.
4Ease of repair
If the gas processing device is made replaceable, then maintenance becomes easier, but the device complexity increases
Solution Approach 1:
The transfer chamber is divided into a chamber body and a separately replaceable gas processing device module. The gas processing device can be replaced by accessing only the module section rather than opening the entire chamber, allowing filter replacement without stopping the transfer process and preventing particle contamination from chamber opening.
Solution Approach 2:
The gas processing device is extracted as a separate replaceable module from the main chamber body. This extraction allows the filter to be replaced by removing only the gas processing module rather than opening the entire chamber, maintaining transfer process continuity and preventing contamination.
Data Source
AI summary
To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter.The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).