Transfer Chamber Atmosphere Control for Oxide Film Management
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Solution Overview
Problem
Substrate processing apparatuses face challenges in managing the atmosphere of the transfer chamber, as existing systems are either fully in an inert gas or air atmosphere, failing to adapt to different processes or film types, which can lead to unwanted natural oxide film formation.
Innovation Solution
A configuration that includes an intake damper, intake fan, inert gas introduction valve, exhaust fan, and a controller to switch between an air atmosphere mode and a purge mode, allowing the transfer chamber to be dynamically switched between air and inert gas environments based on the specific process or film type.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the transfer chamber is maintained in an inert gas atmosphere to prevent natural oxidation of substrates, then substrate protection from oxidation is improved, but the system cannot accommodate processes or film types that require air atmosphere
Solution Approach 1:
The system dynamically switches the transfer chamber atmosphere between inert gas and air modes based on processing requirements. The atmosphere is changed by controlling the introduction of inert gas through valve 24 or air through intake port 12, allowing the system to adapt to different process needs while maintaining substrate protection when required
Solution Approach 2:
The system changes the atmospheric parameter (gas composition) of the transfer chamber by controlling the introduction of different gases. The controller 221 adjusts the atmosphere from inert gas to air or vice versa based on the specific process requirements, enabling versatility while maintaining oxidation protection when needed
2Adaptability or versatility
If the transfer chamber is maintained in an air atmosphere to allow processes that require air, then process versatility is improved, but unwanted natural oxide film formation occurs on substrates
Solution Approach 1:
The system dynamically switches the transfer chamber atmosphere between air and inert gas modes based on processing requirements. When substrate protection is needed, the system introduces inert gas through valve 24; when process versatility is needed, the system uses air through intake port 12, allowing optimal performance for each specific process
Solution Approach 2:
The system changes the atmospheric parameter (gas composition) of the transfer chamber based on process requirements. The controller 221 adjusts the atmosphere from air to inert gas or vice versa, enabling the system to prevent oxide film formation when substrates are present while allowing air atmosphere processes when needed
3Device complexity
If fixed atmosphere control (either always inert gas or always air) is used in the transfer chamber, then system simplicity is maintained, but flexibility to adapt to different processing requirements is reduced
Solution Approach 1:
The transfer chamber atmosphere control system is designed to perform multiple functions: it can maintain inert gas atmosphere for substrate protection, switch to air atmosphere for processes requiring oxygen, and transition between these states. The controller 221 coordinates multiple components (valve 24, intake fan 18, exhaust fan 26, dampers 16 and 30) to achieve this multi-functionality while maintaining reasonable system complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables flexible atmosphere control in the transfer chamber, allowing for intentional or suppression of natural oxide film formation, enhancing the versatility and quality of substrate processing by adapting to different processing requirements.
Implementation Method 1
an exhaust fan 26 and a first exhaust valve 30 both installed in the transfer chamber 124
Implementation Method 2
an intake damper 16 and an intake fan 18 configured to communicate with an intake port 12 that sucks air
Data Source
AI summary
There is provided a configuration that includes: an intake damper and an intake fan configured to communicate with an intake port that sucks air to a transfer chamber connected to a process chamber; a valve of an inert gas introduction pipe configured to supply an inert gas to the transfer chamber; an exhaust fan and a first exhaust valve installed in the transfer chamber; a switch configured to select one of an atmospheric mode in which an atmosphere of the transfer chamber is an air atmosphere and a purge mode in which the atmosphere of the transfer chamber is an inert gas atmosphere; and a controller configured to control each of the intake damper, the intake fan, the valve of the inert gas introduction pipe, the exhaust fan, and the first exhaust valve to execute one of the atmospheric mode and the purge mode.