Transfer Chamber Door-Integrated Circulation Duct for Easier Maintenance
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Solution Overview
Problem
The maintainability of transfer chambers in substrate processing apparatuses, particularly those with airflow circulation systems, is limited due to complex configurations and restricted access for maintenance.
Innovation Solution
Incorporating a transfer chamber design with a gas circulation path, a fan for circulating the atmosphere, a loading port, side surface openings, and a movable door with a circulation duct that forms part of the gas circulation path, allowing for improved access and maintenance without removing the circulation duct.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a gas circulation path with fan is provided in the transfer chamber, then clean air or inert gas circulation is improved, but device complexity increases and maintainability deteriorates
Solution Approach 1:
The circulation duct is nested within the door structure, with the duct being fixed to the inner surface of the door. This integration allows the circulation system to be maintained by simply removing the door, eliminating the need to disconnect separate ductwork and reducing system complexity.
Solution Approach 2:
The circulation duct is merged with the door as an integrated structure. The duct is fixed to the inner surface of the door and moves integrally with it, combining two previously separate components (door and circulation duct) into one unified structure that simplifies maintenance operations.
2Reliability
If a circulation duct is provided in the transfer chamber, then gas circulation is improved, but ease of repair deteriorates due to restricted access
Solution Approach 1:
The circulation duct is nested within the door structure, positioned on the inner surface of the door. This configuration allows maintenance personnel to access the duct simply by removing the door from the transfer chamber, providing easy maintenance access without compromising the circulation function.
Solution Approach 2:
The circulation duct is extracted from the fixed chamber structure and relocated to the movable door. This extraction allows the duct to be easily removed along with the door during maintenance, eliminating the need for complex disconnection procedures and improving ease of repair.
3Ease of repair
If the door is made movable for maintenance access, then ease of repair is improved, but device complexity increases
Solution Approach 1:
The circulation duct is merged with the door as an integrated structure. The duct is fixed to the inner surface of the door and moves integrally with it, combining two previously separate components (door and circulation duct) into one unified structure that simplifies maintenance operations.
Solution Approach 2:
The door serves multiple functions: it provides access to the transfer chamber during normal operation and simultaneously serves as the mounting structure for the circulation duct. This multi-functionality eliminates the need for separate access mechanisms and dedicated duct support structures, reducing overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances maintainability by allowing easy access to the transfer chamber while maintaining the gas circulation path, reducing the apparatus footprint and improving the flexibility of load lock chamber and process chamber positions.
Implementation Method 1
a fan provided in the gas circulation path or at an end part of the gas circulation path and configured to circulate an atmosphere in the transfer space and the gas circulation path
Data Source
AI summary
A technique that includes: a transfer chamber including a transfer space in which a substrate loaded from a substrate accommodation container is transferred; a gas circulation path connecting both ends of the transfer space; a fan in the gas circulation path for circulating atmosphere in the transfer space and the gas circulation path; a loading port through which the substrate is loaded into the transfer space; a side surface opening provided on at least one side surface putting therebetween a side surface of the transfer chamber provided with the loading port, among a plurality of side surfaces forming the transfer chamber, the side surface opening communicating with the transfer space; a door for closing the side surface opening; and a circulation duct movable integrally with the door and provided to constitute the gas circulation path in a state where the door is closed.