Transfer chamber
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Solution Overview
Problem
Existing transfer chambers face challenges in replacing gas processing devices without affecting the internal atmosphere, leading to increased stop time and gas consumption during filter replacement, and potential contamination from external air exposure.
Innovation Solution
A transfer chamber design with a circulation path and connecting/disconnecting means for the gas processing device, allowing for replacement without exposing the internal atmosphere to external air, and a gas purge system to maintain cleanliness and efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the chemical filter is replaced by opening the entire transfer chamber, then the chemical filter can be accessed for replacement, but the transfer process must be stopped and external air enters causing contamination and increased gas consumption
Solution Approach 1:
The transfer chamber is divided into a main chamber and a filter replacement chamber separated by a partition wall. The chemical filter is located in the filter replacement chamber which can be accessed independently through a dedicated access door, allowing filter replacement without opening the main chamber and stopping the transfer process.
Solution Approach 2:
The chemical filter and its housing are extracted as a separate removable unit from the main transfer chamber. The filter replacement chamber can be isolated and accessed independently, allowing the filter to be replaced without exposing the main chamber to external air or stopping the transfer process.
2Ease of repair
If the entire transfer chamber is opened for chemical filter replacement, then the filter can be replaced, but particles and contaminants may enter the transfer chamber requiring additional cleaning time
Solution Approach 1:
The transfer chamber is segmented into a main chamber and a filter replacement chamber. The partition wall with a sealed access door allows the filter replacement chamber to be opened and accessed without exposing the main chamber to external contaminants, preventing particle entry into the clean environment.
Solution Approach 2:
The partition wall with a sealed access door acts as an intermediary barrier between the clean main chamber and the filter replacement chamber. This allows filter replacement operations to be performed in the filter replacement chamber without direct exposure of the main chamber to external air and contaminants.
3Ease of repair
If the chemical filter is replaced with the entire chamber opened, then the filter can be replaced, but gas consumption increases due to atmosphere replacement
Solution Approach 1:
The transfer chamber is segmented into a main chamber and a filter replacement chamber. Only the filter replacement chamber needs to be accessed for filter replacement, while the main chamber maintains its atmosphere, significantly reducing gas consumption compared to opening the entire chamber.
Solution Approach 2:
The filter replacement chamber is designed to be accessed and operated independently before any impact on the main chamber atmosphere. The sealed partition wall ensures that atmosphere replacement is confined to the filter replacement chamber only, minimizing gas consumption during filter replacement operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the replacement of gas processing devices without stopping the transfer process, reducing gas consumption and maintaining a clean internal atmosphere, thus shortening or eliminating stop times associated with filter replacement.
Implementation Method 1
a circulation path formed inside of the transfer chamber to circulate gas
Implementation Method 2
it is possible to efficiently remove chemical components by using a chemical filter as a gas processing device
Data Source
AI summary
The EFEM comprises: a transfer chamber in which a transfer robot is disposed, a first fan that forms a downward air flow in the transfer chamber, a gas return space that circulates the gas flowing downward in the transfer chamber above the first fan, a box that communicates with the transfer chamber and is provided with a gas outlet, and a connecting and disconnecting means configured to switch connection and disconnection of the box to and from the transport chamber. A circulation path in which gas circulates is formed by the transfer chamber, the gas return space, and the box. When the transfer chamber and the box are separated by the connecting and disconnecting means, a shortened circulation path is formed in which the gas circulates without passing through the box.