Transfer chamber
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Solution Overview
Problem
Existing transfer chambers face challenges in replacing gas processing devices without affecting the internal atmosphere, leading to increased stop time and gas consumption, as well as potential contamination during filter replacement.
Innovation Solution
A transfer chamber design with a circulation path and a connecting/disconnecting mechanism for the gas processing device, allowing for replacement without exposing the internal atmosphere to external air, and a gas purge system to maintain cleanliness and efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the chemical filter is replaced by opening the entire transfer chamber, then the chemical filter can be replaced, but the transfer process must be stopped and the internal atmosphere is contaminated
Solution Approach 1:
The transfer chamber is divided into a chamber body and a separately replaceable gas processing device module. The gas processing device can be disconnected and replaced without opening the entire transfer chamber, allowing maintenance without stopping the transfer process and preventing contamination of the internal atmosphere.
2Ease of repair
If the chemical filter is replaced by opening the entire transfer chamber, then the chemical filter can be replaced, but gas consumption increases and replacement time is extended
Solution Approach 1:
The gas processing device is designed as a modular, separately replaceable component. This segmentation allows the filter to be replaced quickly by simply disconnecting the module without the time-consuming process of opening the entire chamber and purging the internal atmosphere.
3Ease of repair
If the chemical filter is replaced by opening the entire transfer chamber, then the chemical filter can be replaced, but the internal atmosphere is exposed to external air causing contamination
Solution Approach 1:
The transfer chamber is segmented into a sealed chamber body and a replaceable gas processing device module. This allows the filter to be replaced without opening the chamber body, thus preventing particles and external air from contaminating the clean internal atmosphere.
Solution Approach 2:
A disconnecting mechanism serves as an intermediary between the chamber body and the gas processing device. This mechanism enables the gas processing device to be removed and replaced without direct exposure of the chamber interior to external air, maintaining atmosphere purity during maintenance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the replacement of gas processing devices without stopping the transfer process, reducing gas consumption and maintaining a clean internal atmosphere, thus shortening or eliminating stop times associated with filter replacement.
Implementation Method 1
a circulation path formed inside of the transfer chamber to circulate gas
Implementation Method 2
it is possible to provide a chemical filter to efficiently remove chemical components from the circulating N2 gas
Data Source
AI summary
To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter.The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).