Transfer Chamber Structure for Robot Maintenance Access
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Solution Overview
Problem
The difficulty in comfortably installing and removing transfer robots from transfer chambers due to the cramped space required for vacuum maintenance, which complicates the task and is exacerbated by the need for upper space that is often used for other equipment.
Innovation Solution
A chamber structure that utilizes a ring-shaped robot base member and a detachable robot flange member to allow the transfer robot to be installed and removed from below, with the arm unit freely insertable through an opening hole, enabling assembly and disassembly without dismantling into upper and lower parts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If the transfer chamber is designed with minimal internal space to minimize vacuum pump-down time, then the vacuum achievement time is reduced, but the operator cannot comfortably access the transfer robot for installation and maintenance tasks
Solution Approach 1:
The transfer robot is divided into two main segments: the base unit that remains inside the transfer chamber, and the arm unit that can be detached and removed. This segmentation allows the operator to work on the arm unit from outside the chamber without needing to access the cramped internal space, while the base unit stays in place to maintain the chamber's compact design.
Solution Approach 2:
A robot flange member is introduced as an intermediary component that connects the arm unit to the base unit. This flange member includes a flange attachment position and a flange removal position, allowing the arm unit to be attached to or removed from the base unit without requiring the operator to work inside the transfer chamber. The flange member acts as a mediator that enables easy assembly and disassembly from outside the chamber.
2Volume of stationary object
If the transfer chamber internal space is minimized for vacuum efficiency, then the chamber size is reduced, but the task of dismantling and installing the transfer robot becomes extremely difficult
Solution Approach 1:
The transfer robot is divided into two main segments: the base unit that remains inside the transfer chamber, and the arm unit that can be detached and removed. This segmentation allows the operator to work on the arm unit from outside the chamber without needing to access the cramped internal space, while the base unit stays in place to maintain the chamber's compact design.
Solution Approach 2:
Instead of requiring the operator to enter the transfer chamber to dismantle the robot, the design inverts the approach by allowing the arm unit to be removed from outside the chamber. The opening in the base portion serves as an access point from which the arm unit can be extracted without the operator needing to work inside the vacuum chamber.
3Adaptability or versatility
If the upper space above the transfer chamber is used for quality control equipment, then the space utilization is improved, but there is insufficient space to remove the arm unit using conventional methods
Solution Approach 1:
Instead of requiring the operator to enter the transfer chamber to dismantle the robot, the design inverts the approach by allowing the arm unit to be removed from outside the chamber. The opening in the base portion serves as an access point from which the arm unit can be extracted without the operator needing to work inside the vacuum chamber.
Solution Approach 2:
The design changes the dimension of access by providing an opening in the base portion of the transfer chamber. This allows the arm unit to be removed vertically from below rather than horizontally from above, utilizing the vertical dimension to bypass the space constraints above the chamber where quality control equipment is installed.
4Device complexity
If the transfer robot is designed as an integrated unit, then the robot structure is simplified, but the robot cannot be easily disassembled for maintenance in a cramped space
Solution Approach 1:
The transfer robot is divided into two main segments: the base unit that remains inside the transfer chamber, and the arm unit that can be detached and removed. This segmentation allows the operator to work on the arm unit from outside the chamber without needing to access the cramped internal space, while the base unit stays in place to maintain the chamber's compact design.
Solution Approach 2:
The connection between the base unit and arm unit is made dynamic rather than fixed. The robot flange member allows the arm unit to be attached and detached as needed, transforming the robot from a static integrated structure to a dynamic modular structure that can be reconfigured for maintenance or replacement.
Data Source
AI summary
There is provided a chamber structure which greatly facilitates maintenance, such as installation and removal of a transfer robot. In this chamber structure, a transfer robot is attached, via a robot base member, to an opening provided in a base portion of a transfer compartment of a transfer chamber. A robot base member is provided below the opening, and the transfer robot includes a base unit and an arm unit provided on an upper part of the base unit. A robot flange member with the same shape as an opening hole in the robot base member is provided above the base unit. The arm unit is freely insertable through the opening hole, and the robot flange member is detachably connected to a peripheral portion of the opening hole.