Transfer Device Temperature Sensor Wafer Cooling
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Solution Overview
Problem
The existing vertical type heat treatment apparatus requires a predetermined cooling time and standby time for wafer transfer, leading to increased collection time and reduced productivity.
Innovation Solution
A transfer device equipped with a temperature sensor and controller that moves between a measurement position and a standby position, transferring the wafer when the temperature drops below a threshold, thereby reducing standby time and improving efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a predetermined cooling time and standby time are required for wafer transfer, then the safety of wafer transfer is improved, but the collection time is increased and productivity is reduced
Solution Approach 1:
The system implements real-time temperature monitoring of the wafer boat using a temperature sensor, with the controller receiving continuous temperature feedback. This enables dynamic determination of transfer timing based on actual temperature conditions rather than fixed predetermined times, allowing transfer to occur as soon as safety conditions are met, thus improving productivity while maintaining safety
Solution Approach 2:
The temperature sensor is positioned to measure the temperature of the wafer boat before transfer, and the controller proactively determines whether transfer conditions are met in advance. By performing preliminary temperature assessment and making transfer decisions based on real-time data, the system eliminates unnecessary standby time while ensuring safety conditions are satisfied
2Loss of time
If real-time temperature measurement is implemented, then the collection time is shortened, but the device complexity is increased
Solution Approach 1:
The temperature sensor serves multiple functions: it monitors wafer boat temperature for transfer timing determination, provides feedback to the controller for decision-making, and enables real-time tracking of cooling progress. This multi-functionality justifies the added component while delivering significant productivity benefits through eliminated standby time
Solution Approach 2:
The system uses its own temperature measurement capability to autonomously determine transfer timing without requiring external intervention or complex external monitoring systems. The controller self-regulates the transfer decision based on temperature feedback from the integrated sensor, simplifying the overall control architecture while achieving real-time monitoring
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution shortens the collection time and enhances productivity by allowing for real-time temperature measurement and rapid transfer of wafers when they reach a safe temperature, minimizing the standby period.
Implementation Method 1
a temperature sensor disposed on the transporter and configured to move between a measurement position at which a temperature of a transfer target object is measured
Data Source
AI summary
A transfer device of an embodiment includes a transporter including a temperature sensor disposed thereon and configured to move between a measurement position at which a temperature of a transfer target object is measured and a standby position separated from the measurement position, and a controller configured to control an operation of the transporter, and the controller moves the transporter between the measurement position and the standby position, and transfers the transfer target object by the transporter when the temperature measured by the temperature sensor at the measurement position continues to be equal to or less than a threshold for a first time.