Semiconductor Transfer Path Optimization for Energy Reduction

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Semiconductor production plants face inefficiencies in energy consumption due to wasteful energy use by transfer apparatuses that circulate without contributing to product manufacture and inefficient selection of transfer carriages and processing apparatuses, leading to extended transfer paths and increased energy consumption.

Innovation Solution

A production efficiency improvement system that selects a processing apparatus with the shortest transfer distance from a predetermined position on the transfer path, considering the position of each processing apparatus, to minimize energy consumption by optimizing the transfer path and reducing unnecessary energy use.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the transfer apparatus circulates on the transfer path to calculate unloading timing until the processing apparatus enters a ready state, then the workpiece can be mounted on the processing apparatus, but the transfer apparatus consumes wasteful energy during circulation

Engineering Contradiction:
Improveworkpiece mounting reliabilityVSAvoidtransfer apparatus energy consumption
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The system performs preliminary actions by having the processing apparatus prepare its ready state in advance and notifying the transfer apparatus beforehand. This allows the transfer apparatus to plan its circulation and unloading timing in advance, reducing unnecessary circulation and energy consumption while ensuring reliable workpiece mounting when needed.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The processing apparatus provides feedback to the transfer apparatus about its ready state and unloading timing requirements. This feedback mechanism enables the transfer apparatus to optimize its circulation path and timing, avoiding wasteful energy consumption while maintaining reliable workpiece delivery.

Inventive Principle:
Principle #23Feedback

2Ease of operation

If only a proper transfer carriage is selected without considering selection of a proper processing apparatus, then transfer carriage selection is simplified, but the transfer path is extended resulting in wasteful energy consumption

Engineering Contradiction:
Improvetransfer carriage selection simplicityVSAvoidtransfer energy consumption
Core Design Contradiction:
Ease of operationVSUse of energy by moving object

Solution Approach 1:

The system applies local quality by making the selection process location-aware. When selecting a processing apparatus, the system considers the positional relationship between the transfer carriage and available processing apparatuses, choosing the nearest suitable apparatus to minimize transfer distance and energy consumption while maintaining operational simplicity.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The system changes the selection parameter from solely considering transfer carriage compatibility to also considering spatial position and transfer distance. This parameter expansion enables optimized selection of processing apparatuses that are both compatible with the transfer carriage and positioned to minimize energy consumption.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS10012980B2Modifying operational efficiency by repositioning process apparatus
Publication Date: 2018.07.03 TOKYO ELECTRON LTD
  • US10012980B2 patent drawing
  • US10012980B2 patent drawing
  • US10012980B2 patent drawing

AI summary

There is provided a production processing system including: a production efficiency improvement device configured to select a processing apparatus that processes workpieces in consideration of a position of each of a plurality of processing apparatuses arranged along a transfer path; and a transfer control device configured to move a transfer apparatus that transfers workpieces from a predetermined position on the transfer path to the selected processing apparatus.