Transfer Plate Dissimilar Material Casting Anti-Oxidation
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Solution Overview
Problem
Conventional cooling plates used in semiconductor manufacturing processes face issues with oxidation and corrosion, leading to blocked passages and compromised cooling performance, especially when made from aluminum, and press-fitting with dissimilar metals results in poor anodizing capabilities.
Innovation Solution
A transfer plate with a dissimilar material structure featuring a tubular passage for fluid flow, where a stainless steel coolant pipe is surface-treated and integrally cast with aluminum or aluminum alloy, enhancing bonding and anti-oxidation properties, and allowing for anodizing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If brazing is used to manufacture the cooling plate, then the passage can be formed easily, but the cooling plate becomes oxidized and corroded causing passage blockage
Solution Approach 1:
The cooling plate is constructed using composite materials: an aluminum base plate bonded with a stainless steel plate. The aluminum base plate provides excellent thermal conductivity for efficient cooling, while the stainless steel plate offers superior anti-oxidation and anti-corrosion properties. This composite structure resolves the contradiction by combining materials with complementary properties rather than using a single material that must compromise between thermal performance and corrosion resistance.
Solution Approach 2:
Different regions of the cooling plate are made from different materials with properties optimized for their specific functions. The base plate uses aluminum for maximum thermal conductivity where heat transfer is critical, while the passage-containing plate uses stainless steel for corrosion resistance where fluid flow and chemical stability are paramount. This local differentiation of material properties allows each region to excel at its primary function without compromising the other.
2Reliability
If press-fitting with dissimilar metal is used, then anti-oxidation and anti-corrosion property is improved, but cooling performance deteriorates and anodizing is impossible
Solution Approach 1:
The invention uses a composite material structure where an aluminum base plate is bonded with a stainless steel plate having passages. This allows the system to achieve both excellent anti-oxidation/corrosion resistance from the stainless steel and superior cooling performance from the aluminum's high thermal conductivity. The composite structure eliminates the need to choose between these conflicting properties.
Solution Approach 2:
The cooling plate employs local quality by using aluminum for the base plate where thermal conductivity is most critical for heat dissipation, and stainless steel for the passage plate where corrosion resistance is paramount. This spatial differentiation of material properties optimizes both cooling performance and anti-corrosion properties simultaneously, rather than using a uniform material that must compromise.
3Loss of energy
If aluminum material is used for the cooling plate, then thermal conductivity is improved, but oxidation and corrosion occur causing passage blockage
Solution Approach 1:
The cooling plate is constructed using composite materials: an aluminum base plate bonded with a stainless steel plate. The aluminum base plate provides excellent thermal conductivity for efficient cooling, while the stainless steel plate offers superior anti-oxidation and anti-corrosion properties. This composite structure resolves the contradiction by combining materials with complementary properties rather than using a single material that must compromise between thermal performance and corrosion resistance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides excellent anti-oxidation and anti-corrosion properties, improved thermal conductivity, and efficient cooling performance while enabling anodizing, thus addressing the limitations of conventional cooling plates.
Implementation Method 1
surface-treating an outer peripheral surface of the tubular pipe to form an intermetallic compound between interfaces, in the casting of the cooling plate
Implementation Method 2
a coolant passage provided in the transfer plate, and a coolant pipe that is inserted into the casting mold before the casting and provides the coolant passage through the casting
Implementation Method 3
an operation of casting the cooling plate by injecting a molten metal into the casting mold
Implementation Method 4
the surface-treating of the outer peripheral surface of the tubular pipe is any one of Zn plating, Ni plating, and Ni—P plating
Data Source
AI summary
Disclosed is a method for manufacturing a cooling plate for cooling a substrate, including an operation of manufacturing a coolant pipe by using a tubular pipe, an operation of inserting the coolant pipe into a casting mold that defines a plate, and an operation of casting the cooling plate by injecting a molten metal into the casting mold.