Transfer Robot Docking for Carrier Handoff During Robot Failure
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Solution Overview
Problem
In semiconductor device manufacturing, the efficiency of processing is reduced when transfer robots fail to transfer containers due to failures, errors, or discharge issues, leading to delays and reduced productivity.
Innovation Solution
A transfer unit and transfer robot system that allows a normally operating transfer robot to dock with a troubled transfer robot, utilizing a transfer robot configured with a lower stage, camera, robot arm, driving unit, and controller to align and dock with another robot, thereby maintaining processing efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple transfer robots are provided to increase processing efficiency, then productivity is improved, but the risk of system failure increases and reliability deteriorates
Solution Approach 1:
The patent merges multiple transfer robots into a cooperative system where they can dock and transfer carriers between each other. When one robot fails, another can take over its tasks by receiving carriers through docking, thus maintaining system reliability while preserving high productivity through parallel operation capability.
Solution Approach 2:
The system dynamically changes operational parameters by switching from independent robot operations to collaborative docking operations. The control unit adjusts the operational state of robots based on real-time status, enabling flexible reconfiguration that maintains both high productivity and reliability.
2Device complexity
If transfer robots operate independently to simplify control, then device complexity is reduced, but the ability to handle failures and maintain continuous operation deteriorates
Solution Approach 1:
Each transfer robot is designed with multi-functionality, capable of both independent operation and collaborative docking operations. The robots can perform multiple roles including primary transfer, backup operation, and carrier handoff, reducing the need for complex specialized control while enhancing reliability through functional redundancy.
3Ease of operation
If transfer robots are positioned far apart to avoid interference, then ease of operation is improved, but the time for carrier transfer increases and productivity deteriorates
Solution Approach 1:
The docking interface acts as an intermediary mechanism that enables rapid carrier transfer between robots positioned at optimal distances. This intermediary docking structure allows robots to maintain operational independence while achieving fast carrier handoff, resolving the conflict between spatial separation and transfer speed.
Data Source
AI summary
A transfer robot, which is configured to recognize a position of another robot loaded with a carrier and dock with the other robot, the transfer robot providing a first surface and a second surface opposite to the first surface, the transfer robot including a lower stage providing a first space for loading the carrier loaded on the other robot, a first camera disposed on the first surface and configured to recognize the position of the other robot and generate position information of the other robot, a robot arm configured to hold the carrier, a driving unit capable of aligning the transfer robot with the other robot by moving the transfer robot, and a controller electrically connected to the first camera, the robot arm, and the driving unit to receive the position information generated by the first camera.