Transfer Robot Thermal Isolation for Uniform Mask Temperature
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Solution Overview
Problem
In charged particle beam drawing apparatuses, the transfer robot's heat is conducted to the mask, causing non-uniform thermal expansion and deteriorating drawing accuracy due to contact and thermal conduction, leading to prolonged soaking times for temperature equalization in a vacuum environment.
Innovation Solution
A transfer robot design with an arm portion of high thermal conductivity, a support portion of lower thermal conductivity, a plate with higher thermal conductivity than the support portion, and a support pad that separates the mask from the plate, along with a projection for contact, helps to distribute and equalize heat, minimizing temperature variation on the mask.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the transfer robot arm is made of high thermal conductivity material for structural strength, then the mechanical strength is improved, but heat is conducted to the mask causing non-uniform thermal expansion
Solution Approach 1:
The transfer robot arm is divided into multiple sections with different thermal conductivity materials. The arm portion uses high thermal conductivity material for strength, while the support portion uses low thermal conductivity material for thermal insulation, segmenting the thermal pathways to prevent heat transfer to the mask.
Solution Approach 2:
Different portions of the transfer robot are assigned different material properties based on local requirements. The arm portion requires high thermal conductivity for structural integrity, while the support portion requires low thermal conductivity for thermal isolation, applying local quality differentiation to resolve the contradiction.
2Device complexity
If the mask is placed directly on the support pad for simple transfer, then the device complexity is reduced, but temperature variation is generated in the mask plane
Solution Approach 1:
A plate is introduced as an intermediary component between the support portion and the mask. This plate acts as a thermal mediator that distributes heat uniformly across its surface, preventing localized temperature variations in the mask while maintaining a relatively simple transfer mechanism.
Solution Approach 2:
The solution introduces a new dimensional element (the plate) between the support portion and the mask, creating an additional thermal distribution layer that eliminates temperature variations without significantly increasing mechanical complexity.
3Ease of operation
If the mask remains in contact with the transfer robot during transfer, then the transfer operation is simplified, but thermal conduction causes non-uniform thermal expansion
Solution Approach 1:
The harmful thermal conduction function is extracted from the transfer robot by using a low thermal conductivity material for the support portion. This allows the transfer operation to remain simple while removing the unwanted heat transfer to the mask.
4Reliability
If the mask is held in contact with the support portion for stable transfer, then the transfer stability is improved, but heat is conducted to the mask causing prolonged soaking time
Solution Approach 1:
The transfer robot is segmented into an arm portion for stable support and a support portion with low thermal conductivity for thermal isolation. This segmentation maintains transfer stability while preventing heat conduction that would require prolonged soaking time.
Solution Approach 2:
The thermal conductivity parameter of the support portion is changed to a low value, fundamentally altering the heat transfer characteristics while maintaining mechanical support functionality, thus reducing soaking time without compromising transfer stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces in-plane temperature variation of the mask, maintaining it substantially uniform and preventing deformation during drawing, thereby enhancing drawing accuracy and reducing soaking time.
Implementation Method 1
The heat of the transfer robot is conducted to the mask through a robot arm
Implementation Method 2
a plate provided between the support portion and the processing object and having a higher thermal conductivity than the support portion
Implementation Method 3
a support pad provided on the support portion and configured to support the processing object by being in contact with the processing object while separating the processing object from the plate
Implementation Method 4
the plate includes a projection configured as the contact region
Data Source
AI summary
A vacuum apparatus includes: a chamber; and a transfer robot transferring a processing object into the chamber, wherein the transfer robot includes an arm portion, a support portion provided at a tip of the arm portion and having a lower thermal conductivity than the arm portion, a plate provided between the support portion and the processing object and having a higher thermal conductivity than the support portion, and a support pad provided on the support portion and supporting the processing object by being in contact with the processing object while separating the processing object from the plate, a contact region allowing the support portion and the plate to be in contact with each other therein and a space region separated the support portion and the plate from each other are provided between the support portion and the plate, and the plate includes a projection configured as the contact region.