Transfer Robot Multi-Hand Substrate Handling
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Solution Overview
Problem
Current substrate processing systems face limitations in reducing transfer time due to constraints on moving speed and positional accuracy, making it difficult to minimize production time effectively.
Innovation Solution
A transfer robot with multiple holding sections on each hand and a moving device that allows for simultaneous handling and transfer of multiple substrates, reducing the distance traveled and optimizing the transfer process by using a standby position for efficient handover and receipt operations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If the moving speed of the hands is increased to reduce transfer time, then the transfer time is reduced, but the positional accuracy and control accuracy deteriorate
Solution Approach 1:
The transfer process is segmented into multiple holding sections (first through fourth holding sections) that can operate independently. This allows the system to divide the transfer task into parallel operations, reducing the total transfer time without requiring any single component to move faster than accuracy limits permit.
Solution Approach 2:
The patent introduces a vertical dimension with multiple holding sections arranged at different heights or positions. This spatial arrangement allows simultaneous handling of multiple substrates, enabling parallel transfer operations that reduce overall transfer time without increasing the speed of individual components.
2Loss of time
If the moving speed of the transport and transfer robots is increased to reduce transfer time, then the transfer time is reduced, but the positional accuracy and control accuracy deteriorate
Solution Approach 1:
The system segments the substrate transfer function across multiple hands with multiple holding sections each. This segmentation allows parallel processing of multiple substrates, reducing the overall transfer time without requiring any single robot or hand to exceed its speed-accuracy performance envelope.
Solution Approach 2:
The patent enables continuous transfer operations by having multiple hands and holding sections that can operate simultaneously and continuously. This eliminates idle time between transfers and maintains continuous useful action, reducing total transfer time without increasing peak speeds.
3Loss of time
If multiple substrates are transferred simultaneously using multiple holding sections, then the transfer time is reduced, but the device complexity increases
Solution Approach 1:
Each hand with multiple holding sections serves multiple functions: holding multiple substrates simultaneously, transferring substrates to different destinations, and operating independently or in coordination with other hands. This multi-functionality reduces the need for separate dedicated components for each function, managing complexity while enabling parallel operations.
Solution Approach 2:
The system employs dynamic control where hands and holding sections can be independently activated and deactivated based on the specific transfer task. This dynamic operation allows the system to scale its complexity only when needed, maintaining simplicity for single-substrate transfers while enabling multi-substrate parallel operations when required.
Data Source
AI summary
A transfer robot is equipped with a first hand and a second hand. The first and the second hands, each have two blades, for holding respective substrates. In addition, the transfer robot includes a rotation unit, a first extension and retraction unit, a second extension and retraction unit and an up-down unit, and by these four units, the first and the second hands can be moved to a substrate transfer relay device where substrates are placed, and to four process chambers.