Transfer Robot Optical Teaching for Narrow Cassette Slots

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Solution Overview

Problem

The teaching work for transfer robots in semiconductor and liquid crystal substrate handling is time-consuming due to the narrow slots and limited visibility within cassettes, requiring manual operations by operators.

Innovation Solution

A transfer robot system equipped with a vertical and horizontal arm assembly, an object detection sensor, and a control device that uses a light emitter and receiver to detect and adjust the hand position based on light transmission through a light-transmitting detection target, allowing for efficient automatic teaching.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If manual teaching operations are performed by operators, then the transfer robot can be taught to perform substrate loading and unloading, but the teaching work becomes extremely time-consuming

Engineering Contradiction:
Improveteaching operationVSAvoidteaching time
Core Design Contradiction:
Ease of operationVSLoss of time

Solution Approach 1:

The patent replaces manual mechanical teaching operations with an optical detection system. The object detection sensor detects the detection target (substrate or cassette features) to automatically determine positions and orientations, substituting the operator's manual visual inspection and manual robot manipulation with automated optical measurement and control system processing.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The teaching system enables the transfer robot to teach itself automatically. The robot moves its own hand to various positions, the detection sensor detects the detection target from these positions, and the control device automatically calculates teaching information based on detection results, eliminating the need for external operator intervention.

Inventive Principle:
Principle #25Self-service

2Loss of information

If the detection target is made of transparent material, then light can pass through for sensor detection, but the hand rotation and positioning becomes more complex

Engineering Contradiction:
Improvedetection signalVSAvoidhand control system
Core Design Contradiction:
Loss of informationVSDevice complexity

Solution Approach 1:

The patent adds rotational degrees of freedom to the hand mechanism, enabling it to rotate around both a central axis and a vertical axis. This multi-dimensional movement capability allows the hand to approach and detect the transparent detection target from multiple angles, ensuring that light from the emitter can pass through the transparent target to reach the receiver regardless of the target's orientation within the narrow cassette slot.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables efficient and automated adjustment of the transfer robot's hand position, reducing manual effort and time required for teaching tasks.

Implementation Method 1

The object detection sensor includes a light emitter and a light receiver for receiving light from the light emitter

Methodology Applied
Scientific EffectLight transmission: Light

Data Source

PatentUS20250303561A1Transfer robot teaching system and transfer robot teaching method
Publication Date: 2025.10.02 DAIHEN CORP
  • US20250303561A1 patent drawing
  • US20250303561A1 patent drawing
  • US20250303561A1 patent drawing

AI summary

A teaching system is provided for a transfer robot including a vertical arm assembly, a rotation member rotatable around a horizontal axis extending in x direction, a horizontal arm assembly supported by the rotation member, a hand supported by the arm assembly and provided with a detection sensor, and a controller to detect a target by the sensor and to teach the position of the hand using detection results from the sensor. The target includes first and second surfaces opposite in y direction. The sensor includes a light emitter and a light receiver. The controller adjusts the angle of the hand around a central axis and a vertical axis based on the rotation angles of the hand through which a first state, where light from the light emitter passes through the first and second surfaces, shifts to a second state where the light receiver receives the maximum amount of light.