Transfer Robot Self-Teaching for Precise End Effector Alignment
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Solution Overview
Problem
Current transfer systems in plasma processing lack automation in teaching the transfer robot, leading to inefficiencies in aligning and positioning transfer targets, such as substrates and consumable members, which affects processing accuracy and productivity.
Innovation Solution
A transfer system comprising a transfer robot with an end effector and a controller that uses sensors and cameras to calculate the relative position between the end effector and the transfer target, determining the teaching position and outputting operation instructions to align the end effector accurately, thereby automating the teaching process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual teaching methods are used for transfer robot alignment, then the system is simpler to implement, but the teaching process is time-consuming and labor-intensive
Solution Approach 1:
The transfer robot performs self-teaching by automatically capturing images of alignment marks, calculating relative positions, and adjusting its own teaching positions without human intervention. The robot uses its own cameras and processing capabilities to autonomously complete the teaching process, eliminating the need for manual operation while improving teaching efficiency
Solution Approach 2:
Manual mechanical teaching operations are replaced by an automated vision-based system. Cameras capture alignment mark images, image processing algorithms calculate positions, and the controller automatically updates teaching positions, substituting the mechanical manual teaching process with an automated optical and computational system
2Manufacturing precision
If extensive manual teaching is performed to ensure positioning accuracy, then positioning precision is improved, but the processing time and labor costs increase
Solution Approach 1:
The system performs preliminary alignment by capturing images of alignment marks before the actual transfer operation. The relative position is calculated in advance, and teaching positions are determined beforehand, allowing the actual transfer to proceed with high accuracy without time-consuming adjustments during production
Solution Approach 2:
The system uses alignment marks and camera feedback to automatically detect and calculate the relative position between the end effector and transfer target. This feedback mechanism enables real-time position correction and ensures high positioning accuracy without requiring extensive manual teaching time
3Productivity
If automation is introduced to reduce teaching time, then productivity is improved, but the device complexity and initial costs increase
Solution Approach 1:
The transfer robot's existing cameras and control system are utilized for multiple purposes: normal operation control, alignment mark detection, relative position calculation, and teaching position determination. This multi-functionality allows automation to be introduced without adding separate dedicated systems, thereby improving productivity while minimizing the increase in device complexity
Solution Approach 2:
Alignment marks serve as intermediaries between the end effector and transfer target, enabling automatic position detection and teaching. The markers provide a common reference that the camera system can detect to calculate relative positions, facilitating automation without requiring complex direct sensing mechanisms between the robot and workpiece
Data Source
AI summary
According to an aspect of the present disclosure, there is provided a transfer system comprising a transfer robot configured to transfer a transfer target object by an end effector based on an operation instruction, and a controller configured to output the operation instruction to the transfer robot, wherein at least any one of the end effector and the transfer target object has at least any one of a sensor and a camera, the controller calculates a relative position between the end effector and the transfer target object based on at least any one of a detected result of the sensor and a captured result of the camera, and the controller determines a teaching position of the end effector with respect to the transfer target object based on the relative position, and outputs the operation instruction to the transfer robot such that the end effector is disposed at the teaching position.