Transfer Substrate Structure for Stable Laser Microdevice Release
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Solution Overview
Problem
The transfer quality of microdevices is adversely affected by variations in laser spot size and focusing position during laser-assisted transfer processes, leading to shifts in the final position and angle of the microdevices on the target substrate.
Innovation Solution
A transfer substrate structure with light-transmitting and non-light-transmitting regions, combined with a response layer that decomposes under specific laser wavelengths, ensuring consistent detachment of microdevices by controlling the decomposition region to the size of the light-transmitting regions, independent of laser spot variations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If laser spot size or focusing position varies during laser-assisted transfer, then the decomposition region of the response layer changes, but this causes shifts in the final position and angle of microdevices on the target substrate
Solution Approach 1:
The substrate is designed with different optical properties in different regions: light-transmitting regions allow laser to pass through to decompose the response layer, while non-light-transmitting regions block the laser. This local differentiation ensures that only microdevices in light-transmitting regions are affected by laser variations, maintaining transfer precision.
Solution Approach 2:
The substrate is segmented into multiple light-transmitting regions and non-light-transmitting regions. This segmentation isolates the microdevice transfer areas from each other, ensuring that laser spot variations in one region do not affect adjacent regions, thereby maintaining consistent transfer quality across multiple microdevices.
2Productivity
If the laser spot size is increased to improve processing speed, then productivity increases, but the decomposition region becomes larger causing position shifts
Solution Approach 1:
The substrate structure confines the laser effect to specific light-transmitting regions regardless of overall laser spot size. Even if a large laser spot is used for high productivity, only the portions overlapping with light-transmitting regions will cause decomposition, preventing excessive decomposition that would lead to position shifts.
3Manufacturing precision
If the laser focusing position is adjusted to compensate for deviations, then position accuracy improves, but this requires complex control and reduces ease of operation
Solution Approach 1:
The substrate structure itself provides the correction function through its light-transmitting and non-light-transmitting region pattern. The physical structure automatically defines the decomposition region boundaries, eliminating the need for complex active control systems to maintain positioning accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Guarantees consistent transfer quality and accuracy by maintaining the detachment state of microdevices, regardless of laser spot size changes or focusing deviations, thereby improving the precision of microdevice placement.
Implementation Method 1
The response layer includes a material which is easy to decompose and release gas under irradiation of a laser with a preset wavelength
Data Source
AI summary
A transfer substrate structure, a transfer assembly and a microdevice transfer method are provided. The transfer substrate structure includes a substrate and a response layer. The substrate includes multiple light-transmitting regions spaced apart from each other and a non-light-transmitting region located between the multiple light-transmitting regions. The response layer is arranged on a side of the substrate and covering at least a part of the multiple light-transmitting regions. The response layer includes a material which is easy to decompose and release gas under irradiation of a laser with a preset wavelength. It can mitigate the effect of the transfer quality of microdevices due to the variations of laser spot.