Transfer Device Teaching Using Detector-Based Position Alignment
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Solution Overview
Problem
The existing teaching methods for transfer devices in semiconductor processing systems are time-consuming and prone to variations in accuracy due to operator skill dependence, requiring manual positioning and visual checks.
Innovation Solution
A method that uses detectors to automatically set the teaching position of a transfer device by detecting the vertical and horizontal positions of a substrate holder, allowing for precise positioning without manual intervention, utilizing sensors to determine the optimal alignment and vacuum attraction pressure for accurate substrate handling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual positioning and visual checks are used for teaching operation, then operator control and flexibility are maintained, but the time required for teaching operation increases and accuracy varies due to operator skill
Solution Approach 1:
The patent replaces manual mechanical positioning with an automatic detection system using detectors. The detector automatically detects the position of the substrate holder and determines teaching positions, eliminating the need for manual visual checks and positioning operations, thereby reducing teaching time while improving positioning accuracy.
Solution Approach 2:
The teaching operation system performs self-positioning by automatically detecting substrate holder positions and calculating teaching positions without operator intervention. The system serves itself by autonomously completing the teaching process, eliminating operator skill dependence and reducing variation in positioning accuracy.
2Productivity
If detectors are used to automatically detect positions, then teaching operation time is reduced and positioning accuracy is improved, but device complexity increases
Solution Approach 1:
The detector is designed to serve multiple functions: it detects the position of the substrate holder, determines teaching positions in both vertical and horizontal directions, and provides data for automatic positioning calculations. This multi-functionality reduces the need for separate detection systems, thereby limiting the increase in device complexity while improving productivity.
3Reliability
If manual teaching operations are performed, then flexible adjustment is possible, but operator skill dependence causes variation in accuracy and increases operational costs
Solution Approach 1:
The system uses the detector to obtain feedback information about the substrate holder's position, automatically calculates the teaching positions based on this feedback, and adjusts the positioning accordingly. This closed-loop feedback mechanism ensures consistent positioning accuracy without relying on operator skill, while the automated calculation process maintains operational simplicity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces the time required for the teaching operation, enhances accuracy, and lowers operational costs by eliminating the need for dedicated teaching jigs and reducing operator-dependent variability.
Implementation Method 1
detecting a vertical position of an object by the first detector while moving the substrate holder in a vertical direction
Implementation Method 2
setting a teaching position of the substrate holder in a horizontal direction based on a horizontal position of the substrate holder at which the substrate holder is detected by a second detector while moving the substrate holder in the horizontal direction
Data Source
AI summary
A method and system for teaching a transfer device including a substrate holder and a first detector disposed at the substrate holder is disclosed. The method comprises detecting a vertical position of an object by the first detector while moving the substrate holder in a vertical direction, and setting a teaching position of the substrate holder in the vertical direction based on the detected vertical position of the object; and setting a teaching position of the substrate holder in a horizontal direction based on a horizontal position of the substrate holder at which the substrate holder is detected by a second detector while moving the substrate holder in the horizontal direction, the second detector being disposed at a position different from a position of the transfer device.