Transfer Unit Positioning via Optical Pin Detection

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Solution Overview

Problem

Conventional methods for positioning transfer units in semiconductor processing systems face challenges such as operator deviation, reduced working efficiency, and increased risk of interference between the pick and the object being processed, particularly due to the difficulty in accurately determining the contact state and precise positioning of semiconductor wafers.

Innovation Solution

A method involving a detection unit on the pick to determine the height reference position, correct the forward moving angle, and calculate the forward movement amount, utilizing support pins and intermediate pins to improve positioning accuracy and reduce operator deviation, while enabling precise transfer unit positioning without manual visual inspection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If manual visual inspection is used to position the wafer, then the operator can check the contact state, but operator deviation occurs and working efficiency is reduced

Engineering Contradiction:

Improvepositioning accuracyVSAvoidworking efficiency

Core Design Contradiction:

Measurement precisionVSProductivity

Solution Approach 1:

The patent replaces manual visual inspection with an automated optical detection system. The detection unit automatically detects the upper edge of support pins and calculates height reference positions, eliminating operator deviation and improving working efficiency while maintaining high positioning accuracy.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system performs self-positioning through automated detection and calculation. The detection unit and control unit work together to automatically determine height reference positions without requiring operator intervention, thereby improving both accuracy and efficiency.

Inventive Principle:

Principle #25Self-service

2Reliability

If manual visual inspection is used to determine contact state, then the operator can verify positioning, but the risk of interference between pick and object increases

Engineering Contradiction:

Improvepositioning reliabilityVSAvoidinterference risk

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent replaces manual visual verification with automated optical detection. The detection unit automatically monitors the contact state between the pick and wafer, providing reliable detection without requiring operator proximity that could cause interference.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The detection unit acts as an intermediary between the pick and the control system. It automatically detects contact state and transmits information to the control unit, eliminating the need for direct operator observation and reducing interference risk.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Ease of operation

If conventional teaching method is used with operator visual inspection, then positioning can be performed, but deviation between operators occurs

Engineering Contradiction:

Improveoperation simplicityVSAvoidpositioning consistency

Core Design Contradiction:

Ease of operationVSMeasurement precision

Solution Approach 1:

The patent replaces operator visual inspection with automated optical detection and calculation. The system automatically detects support pin positions and calculates height reference positions, ensuring consistent results across different operators while maintaining ease of operation.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system changes from subjective operator judgment to objective parameter-based detection. By using optical detection to measure specific parameters (support pin upper edge positions) and calculating height reference positions based on these measurements, the system eliminates operator deviation while keeping the operation simple.

Inventive Principle:

Principle #35Parameter changes

Data Source

PatentUS9541920B2Method for positioning a transfer unit, method for calculating positional deviation amount of an object to be processed, and method for correcting teaching data of the transfer unit

Publication Date: 2017.01.10 TOKYO ELECTRON LTD

AI summary

In a method for positioning a transfer unit including, support pins for supporting object, and a pick having at a leading end thereof a detection unit for detecting presence or absence of the object, a height reference position of the pick is determined by detecting an upper edge of one of the support pins by the detection unit. A forward moving angle of the pick is corrected by obtaining a deviation angle between a radial direction of the mounting table passing through the corresponding support pin and a forward moving direction of the pick. A forward movement starting point of the pick is corrected by obtaining a horizontal deviation distance between the radial direction of the mounting table and the forward moving direction of the pick. A forward moving reference amount of the pick is obtained from coordinates of the corresponding support pin.