Transfer Vehicle Vibration Isolation With Spring-Supported Base Plate

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Solution Overview

Problem

Vibrations transmitted by transferring vehicles in semiconductor fabrication processes can damage articles and disrupt efficient processing, particularly during quick sliding or curved line travel, as existing systems fail to effectively absorb these vibrations.

Innovation Solution

An apparatus comprising a support shaft and vibration absorbing units, including a reinforcing plate elastically supported by springs and a damper system, is integrated between the transferring vehicle and the hoist to minimize vibration transmission, utilizing a combination of first and second vibration absorbing units to absorb twisting and vertical vibrations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the transferring vehicle performs quick sliding driving or curved line traveling to increase article loading and unloading speed, then productivity is improved, but vibration is transmitted to the hoist causing damage to the article

Engineering Contradiction:

Improvearticle loading and unloading speedVSAvoidvibration transmitted to hoist

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

A base plate is introduced as an intermediary component between the transferring vehicle and the hoist. The base plate absorbs and isolates vibrations generated during quick sliding or curved line traveling, preventing them from being transmitted to the hoist and article, thereby enabling high-speed operation without damaging the article

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The base plate is designed to provide beforehand cushioning by absorbing vibrations before they can reach the hoist. This preventive measure ensures that even during aggressive maneuvers like quick sliding or curved line traveling, the hoist and article are protected from harmful vibrations

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

2Speed

If the transferring vehicle performs quick sliding driving or curved line traveling, then article loading and unloading speed is improved, but vibration damages the article

Engineering Contradiction:

Improvearticle loading and unloading speedVSAvoidvibration damage to article

Core Design Contradiction:

SpeedVSObject-affected harmful factors

Solution Approach 1:

The base plate serves as a mediator between the transferring vehicle and the hoist-article system. It captures and dissipates vibrations generated during high-speed maneuvers, allowing the vehicle to operate at increased speeds without transmitting harmful vibrations to the article

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The base plate converts the harmful vibrations generated during quick sliding or curved line traveling into beneficial energy absorption. By designing the base plate with appropriate damping characteristics, the vibration energy is dissipated harmlessly, enabling high-speed operation while protecting the article

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces vibration transmission to the hoist, ensuring independent operation of the transferring vehicle and base plate, thereby minimizing damage to articles and maintaining efficient processing.

Implementation Method 1

a plurality of first springs provided to be spaced apart from each other at an edge of the reinforcing plate and elastically support the reinforcing plate between the reinforcing plate and the base plate

Methodology Applied

Scientific EffectElasticity: Elasticity

Implementation Method 2

a support shaft supporting the transferring vehicle above a base plate provided between the transferring vehicle and a hoist

Methodology Applied

Scientific EffectMechanical support:

Data Source

PatentUS20250091805A1Apparatus of absorbing vibration for transferring vehicle and transferring vehicle system comprising the same

Publication Date: 2025.03.20 SYSTEM ENGINEERING MEGA SOLUTION CO LTD

AI summary

An apparatus of absorbing a vibration for a transferring vehicle that absorbs a vibration of the transferring vehicle, the transferring vehicle including a driving unit and two pairs of wheels, includes: a support shaft supporting the transferring vehicle above a base plate provided between the transferring vehicle and a hoist; and a first vibration absorbing unit provided on the base plate and reducing twisting of the base plate, wherein the first vibration absorbing unit includes: a reinforcing plate provided above the base plate; and a plurality of first springs provided to be spaced apart from each other at an edge of the reinforcing plate and elastically support the reinforcing plate between the reinforcing plate and the base plate.