Transferred Contact Layer for Damage-Free 2D Material Contacts

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Solution Overview

Problem

Existing methods for electrically contacting layered materials like van der Waals and 2D materials are prone to damage, leading to defects and degradation of their superconducting properties, especially during metallization steps, which limits the integration of these materials into scalable electronics devices.

Innovation Solution

A method involving a contact layer with an insulating layer and electrically conductive lines, where the contact layer is formed on a separate substrate and then transferred onto the layered material, allowing for flexible use of various conductive materials, including superconductors, to avoid damage and maintain the material's properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional metallization methods are used to electrically contact layered materials, then electrical connectivity is achieved, but the layered materials suffer from damage, defects, and degradation of their physical properties

Engineering Contradiction:
Improveintegrity of layered materialVSAvoidelectrical contacting process
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent segments the electrical contacting process into multiple stages: first forming a protective encapsulation layer over the layered material, then creating contact holes through this encapsulation, and finally depositing conductive material into these pre-formed holes. This segmentation prevents direct damage to the layered material while achieving reliable electrical contact.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent performs preliminary actions by first forming the encapsulation layer and contact holes before depositing the conductive material. This preliminary structuring creates a protective framework that prevents damage to the layered material during subsequent metallization processes.

Inventive Principle:
Principle #10Preliminary action

2Reliability

If high energy atoms are used for metallization deposition, then electrical conductivity is achieved, but defects are created leading to Fermi level pining and property degradation

Engineering Contradiction:
Improveelectrical contact qualityVSAvoidatomic layer defects
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent applies beforehand cushioning by forming a sacrificial oxide layer and an encapsulation layer that act as protective cushions during the metallization process. These layers absorb the impact of high energy deposition atoms, preventing them from directly damaging the layered material's atomic structure.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Solution Approach 2:

The patent introduces intermediary layers (encapsulation layer and sacrificial oxide) between the high energy metal atoms and the layered material. These intermediaries mediate the deposition process, allowing conductive material to be deposited without directly transmitting damaging energy to the sensitive layered material.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of manufacture

If thermal radiation from crucible is used for metallization, then material deposition is achieved, but the layered material is heated to excessively high temperatures causing chemical decomposition

Engineering Contradiction:
Improvemetallization depositionVSAvoidlayered material temperature
Core Design Contradiction:
Ease of manufactureVSTemperature

Solution Approach 1:

The patent uses the encapsulation layer and sacrificial oxide as thermal intermediaries that protect the layered material from direct exposure to crucible radiation. These layers absorb and distribute thermal energy, preventing localized overheating and chemical decomposition of the layered material during metallization.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent employs an inert atmosphere (nitrogen or argon) during the metallization process to create a protective environment that prevents oxidative degradation and reduces thermal damage to the layered material, allowing higher deposition temperatures without compromising material integrity.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

4Manufacturing precision

If transferred via contacts in h-BN membranes are used, then alignment precision is improved, but the approach is limited by flake size and requires very exact alignment between via contacts and EBL written circuits

Engineering Contradiction:
Improvecontact alignmentVSAvoidalignment process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent creates a universal contact structure where the encapsulation layer serves multiple functions: it protects the layered material, provides a platform for precise contact hole formation, and facilitates alignment with circuit patterns. This multi-functional approach eliminates the need for separate alignment procedures between via contacts and EBL circuits.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent transitions from 2D flake-based contacts to a 3D structured approach with vertical encapsulation layers and contact holes. This dimensional change provides additional alignment tolerance and eliminates the size limitations of 2D flake methods while simplifying the alignment process.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables damage-free electrical contacting of layered materials, allowing for improved integration of high-temperature superconductors into electronics devices, such as Josephson junctions, with enhanced coherence time and tolerance to stray magnetic fields.

Implementation Method 1

the contact layer is formed on a separate substrate and then transferred onto the layered material

Methodology Applied
Scientific EffectTransfer printing:

Implementation Method 2

The first electrically conductive line or the second electrically conductive line comprises a superconductor material

Methodology Applied
Scientific EffectSuperconductivity: Superconductivity

Data Source

PatentEP4270504A1Contact layer for layered materials
Publication Date: 2023.11.01 TERRA QUANTUM AG
  • EP4270504A1 patent drawingFigure 1A
  • EP4270504A1 patent drawingFigure 1B
  • EP4270504A1 patent drawingFigure 2

AI summary

An electronics device comprises a substrate (100), a first layer (102a) of a first layered material arranged over the substrate, a second layer of a second layered material arranged over the substrate, an overlap region, and a contact layer (104). In the overlap region, the second layer is arranged over the first layer, and a section of a bottom surface of the second layer is parallel to a section of a top surface of the first layer. The contact layer is arranged over the first layer and the second layer. The contact layer comprises a plurality of electrically conductive lines and an electrical insulation element. The plurality of electrically conductive lines (108, 108a) comprises a first electrically conductive line and a second electrically conductive line. The first electrically conductive line and/or the second electrically conductive line comprises a superconductor material. The electrical insulation element (114) is arranged between the electrically conductive lines to electrically insulate them from each other. The electronics device further comprises a first electrical contact between the first electrically conductive line and the first layer; and a second electrical contact between the second electrically conductive line and the second layer. A method for manufacturing the electronics device is also disclosed.