Transferring Apparatus Particle Collection Rail Friction
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Solution Overview
Problem
Conventional transferring apparatuses for integrated circuit device manufacturing generate particles due to friction between wheels and rails, deteriorating process reliability.
Innovation Solution
A transferring apparatus with a rail, a travelling part, and a particle collection receptacle at the side of the rail to collect particles generated by friction, along with a cable securing part to direct airflow towards the receptacle, ensuring stable and easy collection of particles.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a wheel travels along a rail to transfer objects in the manufacturing line, then the transferring process can be performed, but particles are generated due to friction between the wheel and rail
Solution Approach 1:
The patent introduces a particle collection receptacle that captures particles generated by friction between the wheel and rail. The receptacle includes a collection unit positioned near the rail and a discharge unit that releases collected particles outside the clean room environment, converting the harmful friction-generated particles into a controlled waste stream that can be removed without contaminating the manufacturing process.
2Ease of operation
If the wheel travels along the rail, then object transfer is enabled, but process reliability deteriorates due to generated particles
Solution Approach 1:
The particle collection receptacle system captures and removes particles generated during wheel-rail friction, converting a reliability-deteriorating factor into a controlled waste stream. The discharge unit releases particles outside the clean room, preventing contamination and maintaining process reliability while preserving the essential wheel-rail transfer mechanism.
3Object-generated harmful factors
If a particle collection receptacle is added to collect particles, then particle generation is minimized, but device complexity increases
Solution Approach 1:
The patent extracts the particle collection function into a separate, dedicated receptacle unit positioned adjacent to the rail. This modular approach allows particles to be collected and discharged independently from the main wheel-rail transfer mechanism, minimizing interference with the primary function while effectively addressing particle generation. The receptacle can be positioned to optimize particle capture without complicating the core transfer system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively minimizes particle generation, enhancing process reliability and product competitiveness by stabilizing particle collection during the transfer process.
Implementation Method 1
particles generated due to friction between the wheel and the rail when the wheel travels along the rail
Data Source
AI summary
In one embodiment a transferring apparatus comprises a rail connected to a frame, a travelling part including a wheel that travels along the rail and a loading part for loading an object, and a particle collection receptacle provided at a side of the rail and configured to collect particles generated due to friction between the wheel and the rail when the wheel travels along the rail. A method of manufacturing an integrated circuit device using the transferring apparatus includes moving the travelling part to the object, picking up the object with the loading part thereby loading the object on the loading part, using the travelling part to move the object to a chamber, and forming a semiconductor device using the object.