Transient Edge Shape Identification for Optical Proximity Correction
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Solution Overview
Problem
Conventional optical proximity correction (OPC) systems in semiconductor fabrication require numerous rigid shape definitions to accommodate minor variations in IC layout shapes, making them cumbersome and inefficient, as they struggle to account for all possible shape variations.
Innovation Solution
The method employs transient edges to define and identify shapes in IC layouts, allowing different variations to be classified as the same shape by satisfying specific edge transition angle conditions, thereby enabling flexible and efficient shape definitions for OPC.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If rigid shape definitions with fixed rules are used to identify shapes in IC layouts, then shape identification accuracy is improved, but the number of shape definitions required increases significantly to accommodate variations
Solution Approach 1:
The patent applies dynamics by making the shape definition system adaptable and flexible rather than rigid. The transient edge concept allows shape definitions to dynamically accommodate variations in IC layouts by permitting edges to temporarily deviate from ideal geometric configurations and then return to the defined shape characteristics, enabling a single shape definition to cover multiple variations.
Solution Approach 2:
The patent utilizes parameter changes by introducing the concept of transient edges that can temporarily alter edge properties (such as connectivity and geometric parameters) without changing the fundamental shape definition. This allows the system to handle variations in shape parameters while maintaining the same shape classification, thereby reducing the number of required shape definitions.
2Adaptability or versatility
If multiple shape definitions are created to cover shape variations, then coverage of all shape types is improved, but the convenience and ease of operation deteriorates due to the cumbersome nature of managing numerous definitions
Solution Approach 1:
The patent applies universality by designing a shape definition system where a single shape definition can serve multiple purposes and cover various shape variations. The transient edge mechanism enables one shape definition to universally handle different edge configurations and variations, eliminating the need for multiple specialized definitions and improving operational convenience.
3Manufacturing precision
If rigid shape definitions are used, then the defined shapes maintain precise geometric characteristics, but the ability to accommodate minor shape variations is lost
Solution Approach 1:
The patent resolves this contradiction by introducing dynamic characteristics through transient edges. These edges allow the shape definition to maintain its precise geometric characteristics while dynamically adapting to minor variations in the actual IC layout. The transient edge can temporarily deviate from the ideal geometry and then return, preserving both precision and adaptability.
Data Source
AI summary
Transient edges are used to define shapes in an integrated circuit layout for optical proximity correction. A first variation of the shape includes a first edge, a second edge satisfying an edge transition angle condition in relation to the first edge, and one or more first transition edges connected between the first edge and the second edge. A second variation of the shape includes a third edge, a fourth edge satisfying the same edge transition angle condition in relation to the third edge, and one or more second transition edges connected between the third edge and the fourth edge. Although the first transition edges are different from the second transition edges, both the first and second variations of the shape are identified as having the same shape, thereby allowing flexibility and efficiency in the shape identification process for optical proximity correction.