Transient Thermal Response Capture in Silicon Crystal Pullers
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Solution Overview
Problem
Current methods lack a practical and accurate way to measure transient temperature fields within a crystal puller, particularly in the hot zone of silicon ingot production, where temperature changes are critical but difficult to capture due to the high temperatures and vacuum conditions.
Innovation Solution
A system comprising a crystal puller, a pyrometer, and an infrared (IR) camera, controlled by a controller, which positions the pyrometer to monitor temperature data and the IR camera to capture images of regions of interest within the hot zone, allowing for the capture of temperature data and images before, during, and after step changes in the crystal puller's components, enabling the measurement of transient temperature properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a pyrometer is used to monitor crystal surface temperature, then temperature measurement is possible, but only one point can be measured and complete temperature field information cannot be captured
Solution Approach 1:
The system divides the temperature measurement task into multiple spatial points by using an IR camera array or multiple pyrometers positioned at different locations. Each sensor measures temperature at its specific viewpoint, and the collective data reconstructs the complete temperature field distribution across the crystal surface and hot zone components.
Solution Approach 2:
The system transitions from one-dimensional point measurement (single pyrometer) to two-dimensional or three-dimensional field measurement by adding spatial dimensions through multiple measurement points and viewpoints. This enables capture of temperature distribution across the entire hot zone and crystal surface rather than at a single location.
2Measurement precision
If contact measurement methods are used, then temperature can be measured, but they cannot measure transient properties in high temperature and vacuum conditions
Solution Approach 1:
The system replaces mechanical contact measurement methods with non-contact optical measurement methods. IR cameras and pyrometers measure temperature through electromagnetic radiation without physical contact, enabling measurement of transient temperature fields in high temperature and vacuum environments where contact sensors would fail or contaminate the sample.
Solution Approach 2:
The system uses electromagnetic radiation (infrared light) as an intermediary to transfer temperature information from the hot zone and crystal surface to the measurement devices. This intermediary allows measurement through the vacuum and high temperature zones without direct contact, preserving the integrity of the measurement system and sample.
3Loss of information
If multiple sensors are positioned to view different regions, then complete temperature field information can be captured, but device complexity increases
Solution Approach 1:
The system employs a multi-functional measurement platform where a single IR camera system can measure temperature at multiple spatial points and capture transient responses to process changes. The same hardware performs both steady-state temperature mapping and dynamic transient measurement, reducing the need for multiple specialized devices.
Solution Approach 2:
The system uses real-time temperature measurements from multiple positions to provide feedback for process control and simulation calibration. By continuously monitoring temperature fields and comparing them with simulated values, the system automatically adjusts measurement and control parameters, reducing the need for complex manual positioning and calibration procedures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This system provides comprehensive and accurate measurements of temperature fields, enabling better control and optimization of the silicon ingot production process by capturing transient properties, improving the efficiency and accuracy of temperature monitoring and simulation calibration.
Implementation Method 1
The pyrometer is positioned to view a region of interest within the hot zone... receive temperature data of the region of interest within the hot zone from the pyrometer
Implementation Method 2
The IR camera is positioned to view one or more additional regions of interest within the hot zone... receiving IR images of the one or more additional regions of interest from the IR camera
Data Source
AI summary
A system for producing a silicon ingot, the system includes a crystal puller, a pyrometer, an infrared (IR) camera, and a controller. The crystal puller includes a hot zone having one or more components therein, and in which a silicon ingot may be pulled. The pyrometer is positioned to view a region of interest within the hot zone. The IR camera is positioned to view one or more additional regions of interest within the hot zone. The controller is connected to the crystal puller, the pyrometer, and the IR camera. The controller is programmed to control the crystal puller to produce a silicon ingot, receive temperature data of the region of interest within the hot zone from the pyrometer while producing the silicon ingot, and receive IR images of the one or more additional regions of interest from the IR camera while producing the silicon ingot.