Transistor Hole Blocking Layer Oxynitride Channel

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Solution Overview

Problem

Transistors with oxynitride semiconductor channel layers face issues with high hole conduction and low sub-threshold slope, leading to increased off-current and reduced performance in display devices.

Innovation Solution

Incorporating a hole blocking layer with a lower valence band maximum energy level than the channel layer, made of materials like GaZn oxide, between the channel layer and source/drain electrodes, to suppress hole conduction and enhance sub-threshold slope, while allowing electron tunneling.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If an oxynitride semiconductor channel layer is used to improve carrier mobility, then operational characteristics are improved, but hole conduction increases leading to high off-current

Engineering Contradiction:
Improveoperational characteristicsVSAvoidhole conduction
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

A hole blocking layer is introduced as an intermediary between the oxynitride semiconductor channel layer and the source/drain electrodes. This intermediate layer selectively blocks hole conduction while allowing electron transport, thereby reducing off-current without compromising the high carrier mobility advantage of the oxynitride channel layer.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The hole blocking layer is applied locally at specific interfaces (channel layer-source electrode and channel layer-drain electrode interfaces) rather than throughout the entire device. This localized application targets the specific problem of hole injection from electrodes into the channel, while preserving the overall electrical characteristics of the transistor.

Inventive Principle:
Principle #3Local quality

2Reliability

If an oxynitride semiconductor channel layer is used to improve carrier mobility, then operational characteristics are improved, but sub-threshold slope decreases

Engineering Contradiction:
Improveoperational characteristicsVSAvoidsub-threshold slope
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The hole blocking layer acts as a mediator that modifies the energy band alignment at the channel-electrode interfaces. By creating appropriate energy barriers, it improves the sub-threshold slope characteristic while maintaining the benefits of the oxynitride channel layer for high carrier mobility operation.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Object-generated harmful factors

If a hole blocking layer is added to reduce off-current, then hole conduction is suppressed, but device complexity increases

Engineering Contradiction:
Improveoff-currentVSAvoidstructure
Core Design Contradiction:
Object-generated harmful factorsVSDevice complexity

Solution Approach 1:

The hole blocking layer is implemented only where needed - at the critical interfaces between the channel layer and source/drain electrodes - rather than as a comprehensive structural modification throughout the device. This localized approach minimizes the increase in device complexity while effectively addressing the off-current problem.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The transistor structure becomes a composite system combining the oxynitride semiconductor channel layer with the hole blocking layer. This composite structure leverages the complementary properties of each material: the high carrier mobility of oxynitride and the hole-blocking capability of the interface layer, achieving improved performance without proportionally increasing complexity.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces off-current and increases the sub-threshold slope, improving the overall performance and reliability of transistors in display devices by controlling hole flow and maintaining low leakage currents.

Implementation Method 1

a hole blocking layer, and source and drain electrodes. The hole blocking layer has a lower valence band maximum energy level than a valance band maximum energy level of the channel layer

Methodology Applied
Scientific EffectEnergy band alignment:

Implementation Method 2

A conduction band minimum energy level of the hole blocking layer may be higher than a conduction band minimum energy level of the channel layer, and the hole blocking layer may have a thickness configured to allow tunneling of electrons

Methodology Applied
Scientific EffectQuantum tunneling:

Data Source

PatentEP2634812B1Transistor, Method Of Manufacturing The Same And Electronic Device Including Transistor
Publication Date: 2016.12.14 SAMSUNG DISPLAY CO LTD
  • EP2634812B1 patent drawingFigure 1
  • EP2634812B1 patent drawingFigure 2
  • EP2634812B1 patent drawingFigure 3

AI summary

A transistor may include a hole blocking layer between a channel layer including oxynitride and an electrode electrically connected to the channel layer. The hole blocking layer may be disposed in a region between the channel layer and at least one of a source electrode and a drain electrode. The channel layer may include, for example, zinc oxynitride (ZnON). A valence band maximum energy level of the hole blocking layer may be lower than a valence band maximum energy level of the channel layer.